6/23/2010	9:37:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	9:37:03 AM	Recipe started at 9:37 AM
6/23/2010	9:37:03 AM	H2 valve closed
6/23/2010	9:37:03 AM	BCl3 valve closed
6/23/2010	9:37:03 AM	PH3 valve closed
6/23/2010	9:37:03 AM	SiCl4 pre valve closed
6/23/2010	9:37:03 AM	SiCl4 post valve closed
6/23/2010	9:37:03 AM	Main Vac valve closed
6/23/2010	9:37:03 AM	Bypass valve closed
6/23/2010	9:37:03 AM	Bubbler valve closed
6/23/2010	9:37:03 AM	Helium valve opened
6/23/2010	9:37:03 AM	Helium MFC set to  500.000000
6/23/2010	9:37:03 AM	H2 MFC set to  0.000000
6/23/2010	9:37:03 AM	BCl3 MFC set to  0.000000
6/23/2010	9:37:03 AM	PHl3 MFC set to  0.000000
6/23/2010	9:37:03 AM	SiCl4 MFC set to  0.000000
6/23/2010	9:37:03 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	9:37:03 AM	Tube furnace set to 0
6/23/2010	9:38:24 AM	Helium valve closed
6/23/2010	9:38:24 AM	H2 valve closed
6/23/2010	9:38:24 AM	BCl3 valve closed
6/23/2010	9:38:24 AM	PH3 valve closed
6/23/2010	9:38:24 AM	SiCl4 pre valve closed
6/23/2010	9:38:24 AM	SiCl4 post valve closed
6/23/2010	9:38:24 AM	Main Vac valve closed
6/23/2010	9:38:24 AM	Bypass valve closed
6/23/2010	9:38:24 AM	Bubbler valve closed
6/23/2010	9:38:24 AM	Helium MFC set to  0.000000
6/23/2010	9:38:24 AM	H2 MFC set to  0.000000
6/23/2010	9:38:24 AM	BCl3 MFC set to  0.000000
6/23/2010	9:38:24 AM	PHl3 MFC set to  0.000000
6/23/2010	9:38:24 AM	SiCl4 MFC set to  0.000000
6/23/2010	9:38:24 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	9:38:24 AM	Tube furnace set to 0
6/23/2010	9:38:24 AM	Run finished at 9:38 AM
6/23/2010	9:38:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:21:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	10:21:28 AM	Recipe started at 10:21 AM
6/23/2010	10:21:28 AM	Helium valve closed
6/23/2010	10:21:28 AM	H2 valve closed
6/23/2010	10:21:28 AM	BCl3 valve closed
6/23/2010	10:21:28 AM	PH3 valve closed
6/23/2010	10:21:28 AM	SiCl4 pre valve closed
6/23/2010	10:21:28 AM	SiCl4 post valve closed
6/23/2010	10:21:28 AM	Main Vac valve closed
6/23/2010	10:21:28 AM	Bubbler valve closed
6/23/2010	10:21:28 AM	Bypass valve opened
6/23/2010	10:21:28 AM	Helium MFC set to  0.000000
6/23/2010	10:21:28 AM	H2 MFC set to  0.000000
6/23/2010	10:21:28 AM	BCl3 MFC set to  0.000000
6/23/2010	10:21:28 AM	PHl3 MFC set to  0.000000
6/23/2010	10:21:28 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:21:28 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:21:28 AM	Tube furnace set to 0
6/23/2010	10:22:17 AM	Helium valve closed
6/23/2010	10:22:17 AM	H2 valve closed
6/23/2010	10:22:17 AM	BCl3 valve closed
6/23/2010	10:22:17 AM	PH3 valve closed
6/23/2010	10:22:17 AM	SiCl4 pre valve closed
6/23/2010	10:22:17 AM	SiCl4 post valve closed
6/23/2010	10:22:17 AM	Bubbler valve closed
6/23/2010	10:22:17 AM	Main Vac valve opened
6/23/2010	10:22:17 AM	Bypass valve opened
6/23/2010	10:22:17 AM	Helium MFC set to  0.000000
6/23/2010	10:22:17 AM	H2 MFC set to  0.000000
6/23/2010	10:22:17 AM	BCl3 MFC set to  0.000000
6/23/2010	10:22:17 AM	PHl3 MFC set to  0.000000
6/23/2010	10:22:17 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:22:17 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:22:17 AM	Tube furnace set to 0
6/23/2010	10:22:17 AM	Run finished at 10:22 AM
6/23/2010	10:22:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	10:24:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:24:08 AM	Recipe started at 10:24 AM
6/23/2010	10:24:08 AM	H2 valve closed
6/23/2010	10:24:08 AM	BCl3 valve closed
6/23/2010	10:24:08 AM	PH3 valve closed
6/23/2010	10:24:08 AM	SiCl4 pre valve closed
6/23/2010	10:24:08 AM	SiCl4 post valve closed
6/23/2010	10:24:08 AM	Main Vac valve closed
6/23/2010	10:24:08 AM	Bypass valve closed
6/23/2010	10:24:08 AM	Bubbler valve closed
6/23/2010	10:24:08 AM	Helium valve opened
6/23/2010	10:24:08 AM	Helium MFC set to  500.000000
6/23/2010	10:24:08 AM	H2 MFC set to  0.000000
6/23/2010	10:24:08 AM	BCl3 MFC set to  0.000000
6/23/2010	10:24:08 AM	PHl3 MFC set to  0.000000
6/23/2010	10:24:08 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:24:08 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:24:08 AM	Tube furnace set to 0
6/23/2010	10:24:31 AM	Helium valve closed
6/23/2010	10:24:31 AM	H2 valve closed
6/23/2010	10:24:31 AM	BCl3 valve closed
6/23/2010	10:24:31 AM	PH3 valve closed
6/23/2010	10:24:31 AM	SiCl4 pre valve closed
6/23/2010	10:24:31 AM	SiCl4 post valve closed
6/23/2010	10:24:31 AM	Main Vac valve closed
6/23/2010	10:24:31 AM	Bypass valve closed
6/23/2010	10:24:31 AM	Bubbler valve closed
6/23/2010	10:24:31 AM	Helium MFC set to  0.000000
6/23/2010	10:24:31 AM	H2 MFC set to  0.000000
6/23/2010	10:24:31 AM	BCl3 MFC set to  0.000000
6/23/2010	10:24:31 AM	PHl3 MFC set to  0.000000
6/23/2010	10:24:31 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:24:31 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:24:31 AM	Tube furnace set to 0
6/23/2010	10:24:31 AM	Run finished at 10:24 AM
6/23/2010	10:24:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:24:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	10:24:35 AM	Recipe started at 10:24 AM
6/23/2010	10:24:35 AM	Helium valve closed
6/23/2010	10:24:35 AM	H2 valve closed
6/23/2010	10:24:35 AM	BCl3 valve closed
6/23/2010	10:24:35 AM	PH3 valve closed
6/23/2010	10:24:35 AM	SiCl4 pre valve closed
6/23/2010	10:24:35 AM	SiCl4 post valve closed
6/23/2010	10:24:35 AM	Main Vac valve closed
6/23/2010	10:24:35 AM	Bubbler valve closed
6/23/2010	10:24:35 AM	Bypass valve opened
6/23/2010	10:24:35 AM	Helium MFC set to  0.000000
6/23/2010	10:24:35 AM	H2 MFC set to  0.000000
6/23/2010	10:24:35 AM	BCl3 MFC set to  0.000000
6/23/2010	10:24:35 AM	PHl3 MFC set to  0.000000
6/23/2010	10:24:35 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:24:35 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:24:35 AM	Tube furnace set to 0
6/23/2010	10:24:57 AM	Helium valve closed
6/23/2010	10:24:57 AM	H2 valve closed
6/23/2010	10:24:57 AM	BCl3 valve closed
6/23/2010	10:24:57 AM	PH3 valve closed
6/23/2010	10:24:57 AM	SiCl4 pre valve closed
6/23/2010	10:24:57 AM	SiCl4 post valve closed
6/23/2010	10:24:57 AM	Bubbler valve closed
6/23/2010	10:24:57 AM	Main Vac valve opened
6/23/2010	10:24:57 AM	Bypass valve opened
6/23/2010	10:24:57 AM	Helium MFC set to  0.000000
6/23/2010	10:24:57 AM	H2 MFC set to  0.000000
6/23/2010	10:24:57 AM	BCl3 MFC set to  0.000000
6/23/2010	10:24:57 AM	PHl3 MFC set to  0.000000
6/23/2010	10:24:57 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:24:57 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:24:57 AM	Tube furnace set to 0
6/23/2010	10:24:58 AM	Run finished at 10:24 AM
6/23/2010	10:24:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	10:34:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:34:40 AM	Recipe started at 10:34 AM
6/23/2010	10:34:40 AM	H2 valve closed
6/23/2010	10:34:40 AM	BCl3 valve closed
6/23/2010	10:34:40 AM	PH3 valve closed
6/23/2010	10:34:40 AM	SiCl4 pre valve closed
6/23/2010	10:34:40 AM	SiCl4 post valve closed
6/23/2010	10:34:40 AM	Main Vac valve closed
6/23/2010	10:34:40 AM	Bypass valve closed
6/23/2010	10:34:40 AM	Bubbler valve closed
6/23/2010	10:34:41 AM	Helium valve opened
6/23/2010	10:34:41 AM	Helium MFC set to  500.000000
6/23/2010	10:34:41 AM	H2 MFC set to  0.000000
6/23/2010	10:34:41 AM	BCl3 MFC set to  0.000000
6/23/2010	10:34:41 AM	PHl3 MFC set to  0.000000
6/23/2010	10:34:41 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:34:41 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:34:41 AM	Tube furnace set to 0
6/23/2010	10:34:54 AM	Helium valve closed
6/23/2010	10:34:54 AM	H2 valve closed
6/23/2010	10:34:54 AM	BCl3 valve closed
6/23/2010	10:34:54 AM	PH3 valve closed
6/23/2010	10:34:54 AM	SiCl4 pre valve closed
6/23/2010	10:34:54 AM	SiCl4 post valve closed
6/23/2010	10:34:54 AM	Main Vac valve closed
6/23/2010	10:34:54 AM	Bypass valve closed
6/23/2010	10:34:54 AM	Bubbler valve closed
6/23/2010	10:34:54 AM	Helium MFC set to  0.000000
6/23/2010	10:34:54 AM	H2 MFC set to  0.000000
6/23/2010	10:34:54 AM	BCl3 MFC set to  0.000000
6/23/2010	10:34:54 AM	PHl3 MFC set to  0.000000
6/23/2010	10:34:54 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:34:54 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:34:54 AM	Tube furnace set to 0
6/23/2010	10:34:54 AM	Run finished at 10:34 AM
6/23/2010	10:34:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:35:06 AM	Helium valve opened
6/23/2010	10:35:14 AM	Helium valve closed
6/23/2010	10:35:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:35:19 AM	Recipe started at 10:35 AM
6/23/2010	10:35:19 AM	H2 valve closed
6/23/2010	10:35:19 AM	BCl3 valve closed
6/23/2010	10:35:19 AM	PH3 valve closed
6/23/2010	10:35:19 AM	SiCl4 pre valve closed
6/23/2010	10:35:19 AM	SiCl4 post valve closed
6/23/2010	10:35:19 AM	Main Vac valve closed
6/23/2010	10:35:19 AM	Bypass valve closed
6/23/2010	10:35:19 AM	Bubbler valve closed
6/23/2010	10:35:19 AM	Helium valve opened
6/23/2010	10:35:19 AM	Helium MFC set to  500.000000
6/23/2010	10:35:19 AM	H2 MFC set to  0.000000
6/23/2010	10:35:19 AM	BCl3 MFC set to  0.000000
6/23/2010	10:35:19 AM	PHl3 MFC set to  0.000000
6/23/2010	10:35:19 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:35:19 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:35:19 AM	Tube furnace set to 0
6/23/2010	10:36:26 AM	Helium valve closed
6/23/2010	10:36:26 AM	H2 valve closed
6/23/2010	10:36:26 AM	BCl3 valve closed
6/23/2010	10:36:26 AM	PH3 valve closed
6/23/2010	10:36:26 AM	SiCl4 pre valve closed
6/23/2010	10:36:26 AM	SiCl4 post valve closed
6/23/2010	10:36:26 AM	Main Vac valve closed
6/23/2010	10:36:26 AM	Bypass valve closed
6/23/2010	10:36:26 AM	Bubbler valve closed
6/23/2010	10:36:26 AM	Helium MFC set to  0.000000
6/23/2010	10:36:26 AM	H2 MFC set to  0.000000
6/23/2010	10:36:26 AM	BCl3 MFC set to  0.000000
6/23/2010	10:36:26 AM	PHl3 MFC set to  0.000000
6/23/2010	10:36:26 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:36:26 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:36:26 AM	Tube furnace set to 0
6/23/2010	10:36:26 AM	Run finished at 10:36 AM
6/23/2010	10:36:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:36:34 AM	Helium valve opened
6/23/2010	10:36:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:36:51 AM	Recipe started at 10:36 AM
6/23/2010	10:36:51 AM	H2 valve closed
6/23/2010	10:36:51 AM	BCl3 valve closed
6/23/2010	10:36:51 AM	PH3 valve closed
6/23/2010	10:36:51 AM	SiCl4 pre valve closed
6/23/2010	10:36:51 AM	SiCl4 post valve closed
6/23/2010	10:36:51 AM	Main Vac valve closed
6/23/2010	10:36:51 AM	Bypass valve closed
6/23/2010	10:36:51 AM	Bubbler valve closed
6/23/2010	10:36:51 AM	Helium valve opened
6/23/2010	10:36:51 AM	Helium MFC set to  500.000000
6/23/2010	10:36:51 AM	H2 MFC set to  0.000000
6/23/2010	10:36:51 AM	BCl3 MFC set to  0.000000
6/23/2010	10:36:51 AM	PHl3 MFC set to  0.000000
6/23/2010	10:36:51 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:36:51 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:36:51 AM	Tube furnace set to 0
6/23/2010	10:36:52 AM	Helium valve closed
6/23/2010	10:36:52 AM	H2 valve closed
6/23/2010	10:36:52 AM	BCl3 valve closed
6/23/2010	10:36:52 AM	PH3 valve closed
6/23/2010	10:36:52 AM	SiCl4 pre valve closed
6/23/2010	10:36:52 AM	SiCl4 post valve closed
6/23/2010	10:36:52 AM	Main Vac valve closed
6/23/2010	10:36:52 AM	Bypass valve closed
6/23/2010	10:36:52 AM	Bubbler valve closed
6/23/2010	10:36:52 AM	Helium MFC set to  0.000000
6/23/2010	10:36:52 AM	H2 MFC set to  0.000000
6/23/2010	10:36:52 AM	BCl3 MFC set to  0.000000
6/23/2010	10:36:52 AM	PHl3 MFC set to  0.000000
6/23/2010	10:36:52 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:36:52 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:36:52 AM	Tube furnace set to 0
6/23/2010	10:36:52 AM	Run finished at 10:36 AM
6/23/2010	10:36:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:37:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	10:37:14 AM	Recipe started at 10:37 AM
6/23/2010	10:37:14 AM	Helium valve closed
6/23/2010	10:37:14 AM	H2 valve closed
6/23/2010	10:37:14 AM	BCl3 valve closed
6/23/2010	10:37:14 AM	PH3 valve closed
6/23/2010	10:37:14 AM	SiCl4 pre valve closed
6/23/2010	10:37:14 AM	SiCl4 post valve closed
6/23/2010	10:37:14 AM	Main Vac valve closed
6/23/2010	10:37:14 AM	Bubbler valve closed
6/23/2010	10:37:14 AM	Bypass valve opened
6/23/2010	10:37:14 AM	Helium MFC set to  0.000000
6/23/2010	10:37:14 AM	H2 MFC set to  0.000000
6/23/2010	10:37:14 AM	BCl3 MFC set to  0.000000
6/23/2010	10:37:14 AM	PHl3 MFC set to  0.000000
6/23/2010	10:37:14 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:37:14 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:37:14 AM	Tube furnace set to 0
6/23/2010	10:37:48 AM	Helium valve closed
6/23/2010	10:37:48 AM	H2 valve closed
6/23/2010	10:37:48 AM	BCl3 valve closed
6/23/2010	10:37:48 AM	PH3 valve closed
6/23/2010	10:37:48 AM	SiCl4 pre valve closed
6/23/2010	10:37:48 AM	SiCl4 post valve closed
6/23/2010	10:37:48 AM	Bubbler valve closed
6/23/2010	10:37:48 AM	Main Vac valve opened
6/23/2010	10:37:48 AM	Bypass valve opened
6/23/2010	10:37:48 AM	Helium MFC set to  0.000000
6/23/2010	10:37:48 AM	H2 MFC set to  0.000000
6/23/2010	10:37:48 AM	BCl3 MFC set to  0.000000
6/23/2010	10:37:48 AM	PHl3 MFC set to  0.000000
6/23/2010	10:37:48 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:37:48 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:37:48 AM	Tube furnace set to 0
6/23/2010	10:37:49 AM	Run finished at 10:37 AM
6/23/2010	10:37:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	10:40:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:40:21 AM	Recipe started at 10:40 AM
6/23/2010	10:40:21 AM	H2 valve closed
6/23/2010	10:40:21 AM	BCl3 valve closed
6/23/2010	10:40:21 AM	PH3 valve closed
6/23/2010	10:40:21 AM	SiCl4 pre valve closed
6/23/2010	10:40:21 AM	SiCl4 post valve closed
6/23/2010	10:40:21 AM	Main Vac valve closed
6/23/2010	10:40:21 AM	Bypass valve closed
6/23/2010	10:40:21 AM	Bubbler valve closed
6/23/2010	10:40:21 AM	Helium valve opened
6/23/2010	10:40:21 AM	Helium MFC set to  500.000000
6/23/2010	10:40:21 AM	H2 MFC set to  0.000000
6/23/2010	10:40:21 AM	BCl3 MFC set to  0.000000
6/23/2010	10:40:21 AM	PHl3 MFC set to  0.000000
6/23/2010	10:40:21 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:40:21 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:40:21 AM	Tube furnace set to 0
6/23/2010	10:41:41 AM	Helium valve closed
6/23/2010	10:41:41 AM	H2 valve closed
6/23/2010	10:41:41 AM	BCl3 valve closed
6/23/2010	10:41:41 AM	PH3 valve closed
6/23/2010	10:41:41 AM	SiCl4 pre valve closed
6/23/2010	10:41:41 AM	SiCl4 post valve closed
6/23/2010	10:41:41 AM	Main Vac valve closed
6/23/2010	10:41:41 AM	Bypass valve closed
6/23/2010	10:41:41 AM	Bubbler valve closed
6/23/2010	10:41:41 AM	Helium MFC set to  0.000000
6/23/2010	10:41:41 AM	H2 MFC set to  0.000000
6/23/2010	10:41:41 AM	BCl3 MFC set to  0.000000
6/23/2010	10:41:41 AM	PHl3 MFC set to  0.000000
6/23/2010	10:41:41 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:41:41 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:41:41 AM	Tube furnace set to 0
6/23/2010	10:41:41 AM	Run finished at 10:41 AM
6/23/2010	10:41:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:41:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	10:41:50 AM	Recipe started at 10:41 AM
6/23/2010	10:41:50 AM	Helium valve closed
6/23/2010	10:41:50 AM	H2 valve closed
6/23/2010	10:41:50 AM	BCl3 valve closed
6/23/2010	10:41:50 AM	PH3 valve closed
6/23/2010	10:41:50 AM	SiCl4 pre valve closed
6/23/2010	10:41:50 AM	SiCl4 post valve closed
6/23/2010	10:41:50 AM	Main Vac valve closed
6/23/2010	10:41:50 AM	Bubbler valve closed
6/23/2010	10:41:50 AM	Bypass valve opened
6/23/2010	10:41:50 AM	Helium MFC set to  0.000000
6/23/2010	10:41:50 AM	H2 MFC set to  0.000000
6/23/2010	10:41:50 AM	BCl3 MFC set to  0.000000
6/23/2010	10:41:50 AM	PHl3 MFC set to  0.000000
6/23/2010	10:41:50 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:41:50 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:41:50 AM	Tube furnace set to 0
6/23/2010	10:42:23 AM	Helium valve closed
6/23/2010	10:42:23 AM	H2 valve closed
6/23/2010	10:42:23 AM	BCl3 valve closed
6/23/2010	10:42:23 AM	PH3 valve closed
6/23/2010	10:42:23 AM	SiCl4 pre valve closed
6/23/2010	10:42:23 AM	SiCl4 post valve closed
6/23/2010	10:42:23 AM	Bubbler valve closed
6/23/2010	10:42:23 AM	Main Vac valve opened
6/23/2010	10:42:23 AM	Bypass valve opened
6/23/2010	10:42:23 AM	Helium MFC set to  0.000000
6/23/2010	10:42:23 AM	H2 MFC set to  0.000000
6/23/2010	10:42:23 AM	BCl3 MFC set to  0.000000
6/23/2010	10:42:23 AM	PHl3 MFC set to  0.000000
6/23/2010	10:42:23 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:42:23 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:42:24 AM	Tube furnace set to 0
6/23/2010	10:42:24 AM	Run finished at 10:42 AM
6/23/2010	10:42:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	10:44:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:44:26 AM	Recipe started at 10:44 AM
6/23/2010	10:44:26 AM	H2 valve closed
6/23/2010	10:44:26 AM	BCl3 valve closed
6/23/2010	10:44:26 AM	PH3 valve closed
6/23/2010	10:44:26 AM	SiCl4 pre valve closed
6/23/2010	10:44:26 AM	SiCl4 post valve closed
6/23/2010	10:44:26 AM	Main Vac valve closed
6/23/2010	10:44:26 AM	Bypass valve closed
6/23/2010	10:44:26 AM	Bubbler valve closed
6/23/2010	10:44:26 AM	Helium valve opened
6/23/2010	10:44:26 AM	Helium MFC set to  500.000000
6/23/2010	10:44:26 AM	H2 MFC set to  0.000000
6/23/2010	10:44:26 AM	BCl3 MFC set to  0.000000
6/23/2010	10:44:26 AM	PHl3 MFC set to  0.000000
6/23/2010	10:44:26 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:44:26 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:44:26 AM	Tube furnace set to 0
6/23/2010	10:44:29 AM	Helium valve closed
6/23/2010	10:44:29 AM	H2 valve closed
6/23/2010	10:44:29 AM	BCl3 valve closed
6/23/2010	10:44:29 AM	PH3 valve closed
6/23/2010	10:44:29 AM	SiCl4 pre valve closed
6/23/2010	10:44:29 AM	SiCl4 post valve closed
6/23/2010	10:44:29 AM	Main Vac valve closed
6/23/2010	10:44:29 AM	Bypass valve closed
6/23/2010	10:44:29 AM	Bubbler valve closed
6/23/2010	10:44:29 AM	Helium MFC set to  0.000000
6/23/2010	10:44:29 AM	H2 MFC set to  0.000000
6/23/2010	10:44:29 AM	BCl3 MFC set to  0.000000
6/23/2010	10:44:29 AM	PHl3 MFC set to  0.000000
6/23/2010	10:44:29 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:44:29 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:44:29 AM	Tube furnace set to 0
6/23/2010	10:44:29 AM	Run finished at 10:44 AM
6/23/2010	10:44:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	10:44:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	10:44:31 AM	Recipe started at 10:44 AM
6/23/2010	10:44:31 AM	Helium valve closed
6/23/2010	10:44:31 AM	H2 valve closed
6/23/2010	10:44:31 AM	BCl3 valve closed
6/23/2010	10:44:31 AM	PH3 valve closed
6/23/2010	10:44:31 AM	SiCl4 pre valve closed
6/23/2010	10:44:31 AM	SiCl4 post valve closed
6/23/2010	10:44:31 AM	Main Vac valve closed
6/23/2010	10:44:31 AM	Bubbler valve closed
6/23/2010	10:44:31 AM	Bypass valve opened
6/23/2010	10:44:31 AM	Helium MFC set to  0.000000
6/23/2010	10:44:31 AM	H2 MFC set to  0.000000
6/23/2010	10:44:31 AM	BCl3 MFC set to  0.000000
6/23/2010	10:44:31 AM	PHl3 MFC set to  0.000000
6/23/2010	10:44:31 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:44:31 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:44:31 AM	Tube furnace set to 0
6/23/2010	10:44:31 AM	Helium valve closed
6/23/2010	10:44:31 AM	H2 valve closed
6/23/2010	10:44:31 AM	BCl3 valve closed
6/23/2010	10:44:31 AM	PH3 valve closed
6/23/2010	10:44:31 AM	SiCl4 pre valve closed
6/23/2010	10:44:31 AM	SiCl4 post valve closed
6/23/2010	10:44:31 AM	Bubbler valve closed
6/23/2010	10:44:31 AM	Main Vac valve opened
6/23/2010	10:44:31 AM	Bypass valve opened
6/23/2010	10:44:31 AM	Helium MFC set to  0.000000
6/23/2010	10:44:31 AM	H2 MFC set to  0.000000
6/23/2010	10:44:31 AM	BCl3 MFC set to  0.000000
6/23/2010	10:44:31 AM	PHl3 MFC set to  0.000000
6/23/2010	10:44:31 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:44:31 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:44:31 AM	Tube furnace set to 0
6/23/2010	10:44:32 AM	Run finished at 10:44 AM
6/23/2010	10:44:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	10:50:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/23/2010	10:50:46 AM	Recipe started at 10:50 AM
6/23/2010	10:50:46 AM	H2 valve closed
6/23/2010	10:50:46 AM	BCl3 valve closed
6/23/2010	10:50:46 AM	PH3 valve closed
6/23/2010	10:50:46 AM	SiCl4 pre valve closed
6/23/2010	10:50:46 AM	SiCl4 post valve closed
6/23/2010	10:50:46 AM	Main Vac valve closed
6/23/2010	10:50:46 AM	Bypass valve closed
6/23/2010	10:50:46 AM	Bubbler valve closed
6/23/2010	10:50:46 AM	Helium valve opened
6/23/2010	10:50:46 AM	Helium MFC set to  500.000000
6/23/2010	10:50:46 AM	H2 MFC set to  0.000000
6/23/2010	10:50:46 AM	BCl3 MFC set to  0.000000
6/23/2010	10:50:46 AM	PHl3 MFC set to  0.000000
6/23/2010	10:50:46 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:50:46 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:50:47 AM	Tube furnace set to 0
6/23/2010	10:52:09 AM	Helium valve closed
6/23/2010	10:52:09 AM	H2 valve closed
6/23/2010	10:52:09 AM	BCl3 valve closed
6/23/2010	10:52:09 AM	PH3 valve closed
6/23/2010	10:52:09 AM	SiCl4 pre valve closed
6/23/2010	10:52:09 AM	SiCl4 post valve closed
6/23/2010	10:52:09 AM	Main Vac valve closed
6/23/2010	10:52:09 AM	Bypass valve closed
6/23/2010	10:52:09 AM	Bubbler valve closed
6/23/2010	10:52:09 AM	Helium MFC set to  0.000000
6/23/2010	10:52:09 AM	H2 MFC set to  0.000000
6/23/2010	10:52:09 AM	BCl3 MFC set to  0.000000
6/23/2010	10:52:09 AM	PHl3 MFC set to  0.000000
6/23/2010	10:52:09 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:52:09 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:52:09 AM	Tube furnace set to 0
6/23/2010	10:52:24 AM	Helium valve closed
6/23/2010	10:52:24 AM	H2 valve closed
6/23/2010	10:52:24 AM	BCl3 valve closed
6/23/2010	10:52:24 AM	PH3 valve closed
6/23/2010	10:52:24 AM	SiCl4 pre valve closed
6/23/2010	10:52:24 AM	SiCl4 post valve closed
6/23/2010	10:52:24 AM	Main Vac valve closed
6/23/2010	10:52:24 AM	Bubbler valve closed
6/23/2010	10:52:24 AM	Bypass valve opened
6/23/2010	10:52:24 AM	Helium MFC set to  0.000000
6/23/2010	10:52:24 AM	H2 MFC set to  0.000000
6/23/2010	10:52:24 AM	BCl3 MFC set to  0.000000
6/23/2010	10:52:24 AM	PHl3 MFC set to  0.000000
6/23/2010	10:52:24 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:52:24 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:52:24 AM	Tube furnace set to 0
6/23/2010	10:52:58 AM	Helium valve closed
6/23/2010	10:52:58 AM	H2 valve closed
6/23/2010	10:52:58 AM	BCl3 valve closed
6/23/2010	10:52:58 AM	PH3 valve closed
6/23/2010	10:52:58 AM	SiCl4 pre valve closed
6/23/2010	10:52:58 AM	SiCl4 post valve closed
6/23/2010	10:52:58 AM	Bubbler valve closed
6/23/2010	10:52:58 AM	Main Vac valve opened
6/23/2010	10:52:58 AM	Bypass valve opened
6/23/2010	10:52:58 AM	Helium MFC set to  0.000000
6/23/2010	10:52:58 AM	H2 MFC set to  0.000000
6/23/2010	10:52:58 AM	BCl3 MFC set to  0.000000
6/23/2010	10:52:58 AM	PHl3 MFC set to  0.000000
6/23/2010	10:52:58 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:52:58 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:52:58 AM	Tube furnace set to 0
6/23/2010	10:57:58 AM	H2 valve closed
6/23/2010	10:57:58 AM	BCl3 valve closed
6/23/2010	10:57:58 AM	PH3 valve closed
6/23/2010	10:57:58 AM	SiCl4 pre valve closed
6/23/2010	10:57:58 AM	SiCl4 post valve closed
6/23/2010	10:57:58 AM	Main Vac valve closed
6/23/2010	10:57:58 AM	Bypass valve closed
6/23/2010	10:57:58 AM	Bubbler valve closed
6/23/2010	10:57:58 AM	Helium valve opened
6/23/2010	10:57:58 AM	Helium MFC set to  500.000000
6/23/2010	10:57:58 AM	H2 MFC set to  0.000000
6/23/2010	10:57:58 AM	BCl3 MFC set to  0.000000
6/23/2010	10:57:58 AM	PHl3 MFC set to  0.000000
6/23/2010	10:57:58 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:57:58 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:57:58 AM	Tube furnace set to 0
6/23/2010	10:59:21 AM	Helium valve closed
6/23/2010	10:59:21 AM	H2 valve closed
6/23/2010	10:59:21 AM	BCl3 valve closed
6/23/2010	10:59:21 AM	PH3 valve closed
6/23/2010	10:59:21 AM	SiCl4 pre valve closed
6/23/2010	10:59:21 AM	SiCl4 post valve closed
6/23/2010	10:59:21 AM	Main Vac valve closed
6/23/2010	10:59:21 AM	Bypass valve closed
6/23/2010	10:59:21 AM	Bubbler valve closed
6/23/2010	10:59:21 AM	Helium MFC set to  0.000000
6/23/2010	10:59:21 AM	H2 MFC set to  0.000000
6/23/2010	10:59:21 AM	BCl3 MFC set to  0.000000
6/23/2010	10:59:21 AM	PHl3 MFC set to  0.000000
6/23/2010	10:59:21 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:59:21 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:59:21 AM	Tube furnace set to 0
6/23/2010	10:59:36 AM	Helium valve closed
6/23/2010	10:59:36 AM	H2 valve closed
6/23/2010	10:59:36 AM	BCl3 valve closed
6/23/2010	10:59:36 AM	PH3 valve closed
6/23/2010	10:59:36 AM	SiCl4 pre valve closed
6/23/2010	10:59:36 AM	SiCl4 post valve closed
6/23/2010	10:59:36 AM	Main Vac valve closed
6/23/2010	10:59:36 AM	Bubbler valve closed
6/23/2010	10:59:36 AM	Bypass valve opened
6/23/2010	10:59:36 AM	Helium MFC set to  0.000000
6/23/2010	10:59:36 AM	H2 MFC set to  0.000000
6/23/2010	10:59:36 AM	BCl3 MFC set to  0.000000
6/23/2010	10:59:36 AM	PHl3 MFC set to  0.000000
6/23/2010	10:59:36 AM	SiCl4 MFC set to  0.000000
6/23/2010	10:59:36 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	10:59:36 AM	Tube furnace set to 0
6/23/2010	11:00:10 AM	Helium valve closed
6/23/2010	11:00:10 AM	H2 valve closed
6/23/2010	11:00:10 AM	BCl3 valve closed
6/23/2010	11:00:10 AM	PH3 valve closed
6/23/2010	11:00:10 AM	SiCl4 pre valve closed
6/23/2010	11:00:10 AM	SiCl4 post valve closed
6/23/2010	11:00:10 AM	Bubbler valve closed
6/23/2010	11:00:10 AM	Main Vac valve opened
6/23/2010	11:00:10 AM	Bypass valve opened
6/23/2010	11:00:10 AM	Helium MFC set to  0.000000
6/23/2010	11:00:10 AM	H2 MFC set to  0.000000
6/23/2010	11:00:10 AM	BCl3 MFC set to  0.000000
6/23/2010	11:00:10 AM	PHl3 MFC set to  0.000000
6/23/2010	11:00:10 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:00:10 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:00:10 AM	Tube furnace set to 0
6/23/2010	11:05:10 AM	H2 valve closed
6/23/2010	11:05:10 AM	BCl3 valve closed
6/23/2010	11:05:10 AM	PH3 valve closed
6/23/2010	11:05:10 AM	SiCl4 pre valve closed
6/23/2010	11:05:10 AM	SiCl4 post valve closed
6/23/2010	11:05:10 AM	Main Vac valve closed
6/23/2010	11:05:10 AM	Bypass valve closed
6/23/2010	11:05:10 AM	Bubbler valve closed
6/23/2010	11:05:10 AM	Helium valve opened
6/23/2010	11:05:10 AM	Helium MFC set to  500.000000
6/23/2010	11:05:10 AM	H2 MFC set to  0.000000
6/23/2010	11:05:10 AM	BCl3 MFC set to  0.000000
6/23/2010	11:05:10 AM	PHl3 MFC set to  0.000000
6/23/2010	11:05:10 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:05:10 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:05:10 AM	Tube furnace set to 0
6/23/2010	11:06:32 AM	Helium valve closed
6/23/2010	11:06:32 AM	H2 valve closed
6/23/2010	11:06:32 AM	BCl3 valve closed
6/23/2010	11:06:32 AM	PH3 valve closed
6/23/2010	11:06:32 AM	SiCl4 pre valve closed
6/23/2010	11:06:32 AM	SiCl4 post valve closed
6/23/2010	11:06:32 AM	Main Vac valve closed
6/23/2010	11:06:32 AM	Bypass valve closed
6/23/2010	11:06:32 AM	Bubbler valve closed
6/23/2010	11:06:32 AM	Helium MFC set to  0.000000
6/23/2010	11:06:32 AM	H2 MFC set to  0.000000
6/23/2010	11:06:32 AM	BCl3 MFC set to  0.000000
6/23/2010	11:06:32 AM	PHl3 MFC set to  0.000000
6/23/2010	11:06:32 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:06:32 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:06:33 AM	Tube furnace set to 0
6/23/2010	11:06:48 AM	Helium valve closed
6/23/2010	11:06:48 AM	H2 valve closed
6/23/2010	11:06:48 AM	BCl3 valve closed
6/23/2010	11:06:48 AM	PH3 valve closed
6/23/2010	11:06:48 AM	SiCl4 pre valve closed
6/23/2010	11:06:48 AM	SiCl4 post valve closed
6/23/2010	11:06:48 AM	Main Vac valve closed
6/23/2010	11:06:48 AM	Bubbler valve closed
6/23/2010	11:06:48 AM	Bypass valve opened
6/23/2010	11:06:48 AM	Helium MFC set to  0.000000
6/23/2010	11:06:48 AM	H2 MFC set to  0.000000
6/23/2010	11:06:48 AM	BCl3 MFC set to  0.000000
6/23/2010	11:06:48 AM	PHl3 MFC set to  0.000000
6/23/2010	11:06:48 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:06:48 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:06:48 AM	Tube furnace set to 0
6/23/2010	11:07:21 AM	Helium valve closed
6/23/2010	11:07:21 AM	H2 valve closed
6/23/2010	11:07:21 AM	BCl3 valve closed
6/23/2010	11:07:21 AM	PH3 valve closed
6/23/2010	11:07:21 AM	SiCl4 pre valve closed
6/23/2010	11:07:21 AM	SiCl4 post valve closed
6/23/2010	11:07:21 AM	Bubbler valve closed
6/23/2010	11:07:21 AM	Main Vac valve opened
6/23/2010	11:07:21 AM	Bypass valve opened
6/23/2010	11:07:21 AM	Helium MFC set to  0.000000
6/23/2010	11:07:21 AM	H2 MFC set to  0.000000
6/23/2010	11:07:21 AM	BCl3 MFC set to  0.000000
6/23/2010	11:07:21 AM	PHl3 MFC set to  0.000000
6/23/2010	11:07:22 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:07:22 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:07:22 AM	Tube furnace set to 0
6/23/2010	11:08:40 AM	Helium valve closed
6/23/2010	11:08:40 AM	H2 valve closed
6/23/2010	11:08:40 AM	BCl3 valve closed
6/23/2010	11:08:40 AM	PH3 valve closed
6/23/2010	11:08:40 AM	SiCl4 pre valve closed
6/23/2010	11:08:40 AM	SiCl4 post valve closed
6/23/2010	11:08:40 AM	Bubbler valve closed
6/23/2010	11:08:40 AM	Main Vac valve opened
6/23/2010	11:08:40 AM	Bypass valve opened
6/23/2010	11:08:40 AM	Helium MFC set to  0.000000
6/23/2010	11:08:40 AM	H2 MFC set to  0.000000
6/23/2010	11:08:40 AM	BCl3 MFC set to  0.000000
6/23/2010	11:08:40 AM	PHl3 MFC set to  0.000000
6/23/2010	11:08:40 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:08:40 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:08:40 AM	Tube furnace set to 0
6/23/2010	11:08:41 AM	Run finished at 11:08 AM
6/23/2010	11:08:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/23/2010	11:08:53 AM	Helium MFC set to  100.000000
6/23/2010	11:08:57 AM	Helium valve opened
6/23/2010	11:09:25 AM	Helium valve closed
6/23/2010	11:10:55 AM	Helium valve opened
6/23/2010	11:11:39 AM	Helium valve closed
6/23/2010	11:30:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/23/2010	11:30:23 AM	Recipe started at 11:30 AM
6/23/2010	11:30:23 AM	H2 valve closed
6/23/2010	11:30:23 AM	BCl3 valve closed
6/23/2010	11:30:23 AM	PH3 valve closed
6/23/2010	11:30:23 AM	SiCl4 pre valve closed
6/23/2010	11:30:23 AM	SiCl4 post valve closed
6/23/2010	11:30:23 AM	Main Vac valve closed
6/23/2010	11:30:23 AM	Bypass valve closed
6/23/2010	11:30:23 AM	Bubbler valve closed
6/23/2010	11:30:23 AM	Helium valve opened
6/23/2010	11:30:23 AM	Helium MFC set to  500.000000
6/23/2010	11:30:23 AM	H2 MFC set to  0.000000
6/23/2010	11:30:23 AM	BCl3 MFC set to  0.000000
6/23/2010	11:30:23 AM	PHl3 MFC set to  0.000000
6/23/2010	11:30:23 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:30:23 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:30:23 AM	Tube furnace set to 0
6/23/2010	11:31:45 AM	Helium valve closed
6/23/2010	11:31:45 AM	H2 valve closed
6/23/2010	11:31:45 AM	BCl3 valve closed
6/23/2010	11:31:45 AM	PH3 valve closed
6/23/2010	11:31:45 AM	SiCl4 pre valve closed
6/23/2010	11:31:45 AM	SiCl4 post valve closed
6/23/2010	11:31:45 AM	Main Vac valve closed
6/23/2010	11:31:45 AM	Bypass valve closed
6/23/2010	11:31:45 AM	Bubbler valve closed
6/23/2010	11:31:45 AM	Helium MFC set to  0.000000
6/23/2010	11:31:45 AM	H2 MFC set to  0.000000
6/23/2010	11:31:45 AM	BCl3 MFC set to  0.000000
6/23/2010	11:31:45 AM	PHl3 MFC set to  0.000000
6/23/2010	11:31:45 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:31:45 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:31:45 AM	Tube furnace set to 0
6/23/2010	11:32:00 AM	Helium valve closed
6/23/2010	11:32:00 AM	H2 valve closed
6/23/2010	11:32:00 AM	BCl3 valve closed
6/23/2010	11:32:00 AM	PH3 valve closed
6/23/2010	11:32:00 AM	SiCl4 pre valve closed
6/23/2010	11:32:00 AM	SiCl4 post valve closed
6/23/2010	11:32:00 AM	Main Vac valve closed
6/23/2010	11:32:00 AM	Bubbler valve closed
6/23/2010	11:32:00 AM	Bypass valve opened
6/23/2010	11:32:00 AM	Helium MFC set to  0.000000
6/23/2010	11:32:00 AM	H2 MFC set to  0.000000
6/23/2010	11:32:00 AM	BCl3 MFC set to  0.000000
6/23/2010	11:32:00 AM	PHl3 MFC set to  0.000000
6/23/2010	11:32:00 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:32:00 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:32:01 AM	Tube furnace set to 0
6/23/2010	11:32:34 AM	Helium valve closed
6/23/2010	11:32:34 AM	H2 valve closed
6/23/2010	11:32:34 AM	BCl3 valve closed
6/23/2010	11:32:34 AM	PH3 valve closed
6/23/2010	11:32:34 AM	SiCl4 pre valve closed
6/23/2010	11:32:34 AM	SiCl4 post valve closed
6/23/2010	11:32:34 AM	Bubbler valve closed
6/23/2010	11:32:34 AM	Main Vac valve opened
6/23/2010	11:32:34 AM	Bypass valve opened
6/23/2010	11:32:34 AM	Helium MFC set to  0.000000
6/23/2010	11:32:34 AM	H2 MFC set to  0.000000
6/23/2010	11:32:34 AM	BCl3 MFC set to  0.000000
6/23/2010	11:32:34 AM	PHl3 MFC set to  0.000000
6/23/2010	11:32:34 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:32:34 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:32:35 AM	Tube furnace set to 0
6/23/2010	11:37:35 AM	H2 valve closed
6/23/2010	11:37:35 AM	BCl3 valve closed
6/23/2010	11:37:35 AM	PH3 valve closed
6/23/2010	11:37:35 AM	SiCl4 pre valve closed
6/23/2010	11:37:35 AM	SiCl4 post valve closed
6/23/2010	11:37:35 AM	Main Vac valve closed
6/23/2010	11:37:35 AM	Bypass valve closed
6/23/2010	11:37:35 AM	Bubbler valve closed
6/23/2010	11:37:35 AM	Helium valve opened
6/23/2010	11:37:35 AM	Helium MFC set to  500.000000
6/23/2010	11:37:35 AM	H2 MFC set to  0.000000
6/23/2010	11:37:35 AM	BCl3 MFC set to  0.000000
6/23/2010	11:37:35 AM	PHl3 MFC set to  0.000000
6/23/2010	11:37:35 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:37:35 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:37:35 AM	Tube furnace set to 0
6/23/2010	11:38:57 AM	Helium valve closed
6/23/2010	11:38:57 AM	H2 valve closed
6/23/2010	11:38:57 AM	BCl3 valve closed
6/23/2010	11:38:57 AM	PH3 valve closed
6/23/2010	11:38:57 AM	SiCl4 pre valve closed
6/23/2010	11:38:57 AM	SiCl4 post valve closed
6/23/2010	11:38:57 AM	Main Vac valve closed
6/23/2010	11:38:57 AM	Bypass valve closed
6/23/2010	11:38:57 AM	Bubbler valve closed
6/23/2010	11:38:57 AM	Helium MFC set to  0.000000
6/23/2010	11:38:57 AM	H2 MFC set to  0.000000
6/23/2010	11:38:57 AM	BCl3 MFC set to  0.000000
6/23/2010	11:38:57 AM	PHl3 MFC set to  0.000000
6/23/2010	11:38:57 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:38:57 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:38:57 AM	Tube furnace set to 0
6/23/2010	11:39:12 AM	Helium valve closed
6/23/2010	11:39:12 AM	H2 valve closed
6/23/2010	11:39:12 AM	BCl3 valve closed
6/23/2010	11:39:12 AM	PH3 valve closed
6/23/2010	11:39:12 AM	SiCl4 pre valve closed
6/23/2010	11:39:12 AM	SiCl4 post valve closed
6/23/2010	11:39:12 AM	Main Vac valve closed
6/23/2010	11:39:12 AM	Bubbler valve closed
6/23/2010	11:39:12 AM	Bypass valve opened
6/23/2010	11:39:12 AM	Helium MFC set to  0.000000
6/23/2010	11:39:12 AM	H2 MFC set to  0.000000
6/23/2010	11:39:12 AM	BCl3 MFC set to  0.000000
6/23/2010	11:39:12 AM	PHl3 MFC set to  0.000000
6/23/2010	11:39:12 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:39:12 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:39:12 AM	Tube furnace set to 0
6/23/2010	11:39:46 AM	Helium valve closed
6/23/2010	11:39:46 AM	H2 valve closed
6/23/2010	11:39:46 AM	BCl3 valve closed
6/23/2010	11:39:46 AM	PH3 valve closed
6/23/2010	11:39:46 AM	SiCl4 pre valve closed
6/23/2010	11:39:46 AM	SiCl4 post valve closed
6/23/2010	11:39:46 AM	Bubbler valve closed
6/23/2010	11:39:46 AM	Main Vac valve opened
6/23/2010	11:39:46 AM	Bypass valve opened
6/23/2010	11:39:46 AM	Helium MFC set to  0.000000
6/23/2010	11:39:46 AM	H2 MFC set to  0.000000
6/23/2010	11:39:46 AM	BCl3 MFC set to  0.000000
6/23/2010	11:39:46 AM	PHl3 MFC set to  0.000000
6/23/2010	11:39:46 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:39:46 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:39:46 AM	Tube furnace set to 0
6/23/2010	11:44:46 AM	H2 valve closed
6/23/2010	11:44:46 AM	BCl3 valve closed
6/23/2010	11:44:46 AM	PH3 valve closed
6/23/2010	11:44:46 AM	SiCl4 pre valve closed
6/23/2010	11:44:46 AM	SiCl4 post valve closed
6/23/2010	11:44:46 AM	Main Vac valve closed
6/23/2010	11:44:46 AM	Bypass valve closed
6/23/2010	11:44:46 AM	Bubbler valve closed
6/23/2010	11:44:46 AM	Helium valve opened
6/23/2010	11:44:46 AM	Helium MFC set to  500.000000
6/23/2010	11:44:46 AM	H2 MFC set to  0.000000
6/23/2010	11:44:46 AM	BCl3 MFC set to  0.000000
6/23/2010	11:44:46 AM	PHl3 MFC set to  0.000000
6/23/2010	11:44:46 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:44:46 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:44:46 AM	Tube furnace set to 0
6/23/2010	11:46:09 AM	Helium valve closed
6/23/2010	11:46:09 AM	H2 valve closed
6/23/2010	11:46:09 AM	BCl3 valve closed
6/23/2010	11:46:09 AM	PH3 valve closed
6/23/2010	11:46:09 AM	SiCl4 pre valve closed
6/23/2010	11:46:09 AM	SiCl4 post valve closed
6/23/2010	11:46:09 AM	Main Vac valve closed
6/23/2010	11:46:09 AM	Bypass valve closed
6/23/2010	11:46:09 AM	Bubbler valve closed
6/23/2010	11:46:09 AM	Helium MFC set to  0.000000
6/23/2010	11:46:09 AM	H2 MFC set to  0.000000
6/23/2010	11:46:09 AM	BCl3 MFC set to  0.000000
6/23/2010	11:46:09 AM	PHl3 MFC set to  0.000000
6/23/2010	11:46:09 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:46:09 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:46:09 AM	Tube furnace set to 0
6/23/2010	11:46:24 AM	Helium valve closed
6/23/2010	11:46:24 AM	H2 valve closed
6/23/2010	11:46:24 AM	BCl3 valve closed
6/23/2010	11:46:24 AM	PH3 valve closed
6/23/2010	11:46:24 AM	SiCl4 pre valve closed
6/23/2010	11:46:24 AM	SiCl4 post valve closed
6/23/2010	11:46:24 AM	Main Vac valve closed
6/23/2010	11:46:24 AM	Bubbler valve closed
6/23/2010	11:46:24 AM	Bypass valve opened
6/23/2010	11:46:24 AM	Helium MFC set to  0.000000
6/23/2010	11:46:24 AM	H2 MFC set to  0.000000
6/23/2010	11:46:24 AM	BCl3 MFC set to  0.000000
6/23/2010	11:46:24 AM	PHl3 MFC set to  0.000000
6/23/2010	11:46:24 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:46:24 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:46:24 AM	Tube furnace set to 0
6/23/2010	11:46:58 AM	Helium valve closed
6/23/2010	11:46:58 AM	H2 valve closed
6/23/2010	11:46:58 AM	BCl3 valve closed
6/23/2010	11:46:58 AM	PH3 valve closed
6/23/2010	11:46:58 AM	SiCl4 pre valve closed
6/23/2010	11:46:58 AM	SiCl4 post valve closed
6/23/2010	11:46:58 AM	Bubbler valve closed
6/23/2010	11:46:58 AM	Main Vac valve opened
6/23/2010	11:46:58 AM	Bypass valve opened
6/23/2010	11:46:58 AM	Helium MFC set to  0.000000
6/23/2010	11:46:58 AM	H2 MFC set to  0.000000
6/23/2010	11:46:58 AM	BCl3 MFC set to  0.000000
6/23/2010	11:46:58 AM	PHl3 MFC set to  0.000000
6/23/2010	11:46:58 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:46:58 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:46:58 AM	Tube furnace set to 0
6/23/2010	11:50:23 AM	Helium valve closed
6/23/2010	11:50:23 AM	H2 valve closed
6/23/2010	11:50:23 AM	BCl3 valve closed
6/23/2010	11:50:23 AM	PH3 valve closed
6/23/2010	11:50:23 AM	SiCl4 pre valve closed
6/23/2010	11:50:23 AM	SiCl4 post valve closed
6/23/2010	11:50:23 AM	Bubbler valve closed
6/23/2010	11:50:23 AM	Main Vac valve opened
6/23/2010	11:50:23 AM	Bypass valve opened
6/23/2010	11:50:23 AM	Helium MFC set to  0.000000
6/23/2010	11:50:23 AM	H2 MFC set to  0.000000
6/23/2010	11:50:23 AM	BCl3 MFC set to  0.000000
6/23/2010	11:50:23 AM	PHl3 MFC set to  0.000000
6/23/2010	11:50:23 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:50:23 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:50:23 AM	Tube furnace set to 0
6/23/2010	11:50:24 AM	Run finished at 11:50 AM
6/23/2010	11:50:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/23/2010	11:50:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/23/2010	11:50:39 AM	Recipe started at 11:50 AM
6/23/2010	11:50:39 AM	H2 valve closed
6/23/2010	11:50:39 AM	BCl3 valve closed
6/23/2010	11:50:39 AM	PH3 valve closed
6/23/2010	11:50:39 AM	SiCl4 pre valve closed
6/23/2010	11:50:39 AM	SiCl4 post valve closed
6/23/2010	11:50:39 AM	Main Vac valve closed
6/23/2010	11:50:39 AM	Bypass valve closed
6/23/2010	11:50:39 AM	Bubbler valve closed
6/23/2010	11:50:39 AM	Helium valve opened
6/23/2010	11:50:39 AM	Helium MFC set to  500.000000
6/23/2010	11:50:39 AM	H2 MFC set to  0.000000
6/23/2010	11:50:39 AM	BCl3 MFC set to  0.000000
6/23/2010	11:50:39 AM	PHl3 MFC set to  0.000000
6/23/2010	11:50:39 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:50:39 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:50:39 AM	Tube furnace set to 0
6/23/2010	11:52:01 AM	Helium valve closed
6/23/2010	11:52:01 AM	H2 valve closed
6/23/2010	11:52:01 AM	BCl3 valve closed
6/23/2010	11:52:01 AM	PH3 valve closed
6/23/2010	11:52:01 AM	SiCl4 pre valve closed
6/23/2010	11:52:01 AM	SiCl4 post valve closed
6/23/2010	11:52:01 AM	Main Vac valve closed
6/23/2010	11:52:01 AM	Bypass valve closed
6/23/2010	11:52:01 AM	Bubbler valve closed
6/23/2010	11:52:01 AM	Helium MFC set to  0.000000
6/23/2010	11:52:01 AM	H2 MFC set to  0.000000
6/23/2010	11:52:01 AM	BCl3 MFC set to  0.000000
6/23/2010	11:52:01 AM	PHl3 MFC set to  0.000000
6/23/2010	11:52:01 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:52:01 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:52:01 AM	Tube furnace set to 0
6/23/2010	11:52:16 AM	Helium valve closed
6/23/2010	11:52:16 AM	H2 valve closed
6/23/2010	11:52:16 AM	BCl3 valve closed
6/23/2010	11:52:16 AM	PH3 valve closed
6/23/2010	11:52:16 AM	SiCl4 pre valve closed
6/23/2010	11:52:16 AM	SiCl4 post valve closed
6/23/2010	11:52:16 AM	Main Vac valve closed
6/23/2010	11:52:16 AM	Bubbler valve closed
6/23/2010	11:52:16 AM	Bypass valve opened
6/23/2010	11:52:16 AM	Helium MFC set to  0.000000
6/23/2010	11:52:16 AM	H2 MFC set to  0.000000
6/23/2010	11:52:17 AM	BCl3 MFC set to  0.000000
6/23/2010	11:52:17 AM	PHl3 MFC set to  0.000000
6/23/2010	11:52:17 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:52:17 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:52:17 AM	Tube furnace set to 0
6/23/2010	11:52:50 AM	Helium valve closed
6/23/2010	11:52:50 AM	H2 valve closed
6/23/2010	11:52:50 AM	BCl3 valve closed
6/23/2010	11:52:50 AM	PH3 valve closed
6/23/2010	11:52:50 AM	SiCl4 pre valve closed
6/23/2010	11:52:50 AM	SiCl4 post valve closed
6/23/2010	11:52:50 AM	Bubbler valve closed
6/23/2010	11:52:50 AM	Main Vac valve opened
6/23/2010	11:52:50 AM	Bypass valve opened
6/23/2010	11:52:50 AM	Helium MFC set to  0.000000
6/23/2010	11:52:50 AM	H2 MFC set to  0.000000
6/23/2010	11:52:50 AM	BCl3 MFC set to  0.000000
6/23/2010	11:52:50 AM	PHl3 MFC set to  0.000000
6/23/2010	11:52:50 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:52:50 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:52:51 AM	Tube furnace set to 0
6/23/2010	11:57:51 AM	H2 valve closed
6/23/2010	11:57:51 AM	BCl3 valve closed
6/23/2010	11:57:51 AM	PH3 valve closed
6/23/2010	11:57:51 AM	SiCl4 pre valve closed
6/23/2010	11:57:51 AM	SiCl4 post valve closed
6/23/2010	11:57:51 AM	Main Vac valve closed
6/23/2010	11:57:51 AM	Bypass valve closed
6/23/2010	11:57:51 AM	Bubbler valve closed
6/23/2010	11:57:51 AM	Helium valve opened
6/23/2010	11:57:51 AM	Helium MFC set to  500.000000
6/23/2010	11:57:51 AM	H2 MFC set to  0.000000
6/23/2010	11:57:51 AM	BCl3 MFC set to  0.000000
6/23/2010	11:57:51 AM	PHl3 MFC set to  0.000000
6/23/2010	11:57:51 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:57:51 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:57:51 AM	Tube furnace set to 0
6/23/2010	11:59:13 AM	Helium valve closed
6/23/2010	11:59:13 AM	H2 valve closed
6/23/2010	11:59:13 AM	BCl3 valve closed
6/23/2010	11:59:13 AM	PH3 valve closed
6/23/2010	11:59:13 AM	SiCl4 pre valve closed
6/23/2010	11:59:13 AM	SiCl4 post valve closed
6/23/2010	11:59:13 AM	Main Vac valve closed
6/23/2010	11:59:13 AM	Bypass valve closed
6/23/2010	11:59:13 AM	Bubbler valve closed
6/23/2010	11:59:13 AM	Helium MFC set to  0.000000
6/23/2010	11:59:13 AM	H2 MFC set to  0.000000
6/23/2010	11:59:13 AM	BCl3 MFC set to  0.000000
6/23/2010	11:59:13 AM	PHl3 MFC set to  0.000000
6/23/2010	11:59:13 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:59:13 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:59:13 AM	Tube furnace set to 0
6/23/2010	11:59:28 AM	Helium valve closed
6/23/2010	11:59:28 AM	H2 valve closed
6/23/2010	11:59:28 AM	BCl3 valve closed
6/23/2010	11:59:28 AM	PH3 valve closed
6/23/2010	11:59:28 AM	SiCl4 pre valve closed
6/23/2010	11:59:28 AM	SiCl4 post valve closed
6/23/2010	11:59:28 AM	Main Vac valve closed
6/23/2010	11:59:28 AM	Bubbler valve closed
6/23/2010	11:59:28 AM	Bypass valve opened
6/23/2010	11:59:28 AM	Helium MFC set to  0.000000
6/23/2010	11:59:28 AM	H2 MFC set to  0.000000
6/23/2010	11:59:28 AM	BCl3 MFC set to  0.000000
6/23/2010	11:59:28 AM	PHl3 MFC set to  0.000000
6/23/2010	11:59:28 AM	SiCl4 MFC set to  0.000000
6/23/2010	11:59:28 AM	Bypass solenoid MFC set to  0.000000
6/23/2010	11:59:28 AM	Tube furnace set to 0
6/23/2010	12:00:02 PM	Helium valve closed
6/23/2010	12:00:02 PM	H2 valve closed
6/23/2010	12:00:02 PM	BCl3 valve closed
6/23/2010	12:00:02 PM	PH3 valve closed
6/23/2010	12:00:02 PM	SiCl4 pre valve closed
6/23/2010	12:00:02 PM	SiCl4 post valve closed
6/23/2010	12:00:02 PM	Bubbler valve closed
6/23/2010	12:00:02 PM	Main Vac valve opened
6/23/2010	12:00:02 PM	Bypass valve opened
6/23/2010	12:00:02 PM	Helium MFC set to  0.000000
6/23/2010	12:00:02 PM	H2 MFC set to  0.000000
6/23/2010	12:00:02 PM	BCl3 MFC set to  0.000000
6/23/2010	12:00:02 PM	PHl3 MFC set to  0.000000
6/23/2010	12:00:02 PM	SiCl4 MFC set to  0.000000
6/23/2010	12:00:02 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	12:00:02 PM	Tube furnace set to 0
6/23/2010	12:01:30 PM	H2 valve closed
6/23/2010	12:01:30 PM	BCl3 valve closed
6/23/2010	12:01:30 PM	PH3 valve closed
6/23/2010	12:01:30 PM	SiCl4 pre valve closed
6/23/2010	12:01:30 PM	SiCl4 post valve closed
6/23/2010	12:01:30 PM	Main Vac valve closed
6/23/2010	12:01:30 PM	Bypass valve closed
6/23/2010	12:01:30 PM	Bubbler valve closed
6/23/2010	12:01:30 PM	Helium valve opened
6/23/2010	12:01:30 PM	Helium MFC set to  500.000000
6/23/2010	12:01:30 PM	H2 MFC set to  0.000000
6/23/2010	12:01:30 PM	BCl3 MFC set to  0.000000
6/23/2010	12:01:30 PM	PHl3 MFC set to  0.000000
6/23/2010	12:01:30 PM	SiCl4 MFC set to  0.000000
6/23/2010	12:01:30 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	12:01:30 PM	Tube furnace set to 0
6/23/2010	12:02:52 PM	Helium valve closed
6/23/2010	12:02:52 PM	H2 valve closed
6/23/2010	12:02:52 PM	BCl3 valve closed
6/23/2010	12:02:52 PM	PH3 valve closed
6/23/2010	12:02:52 PM	SiCl4 pre valve closed
6/23/2010	12:02:52 PM	SiCl4 post valve closed
6/23/2010	12:02:52 PM	Main Vac valve closed
6/23/2010	12:02:52 PM	Bypass valve closed
6/23/2010	12:02:52 PM	Bubbler valve closed
6/23/2010	12:02:52 PM	Helium MFC set to  0.000000
6/23/2010	12:02:52 PM	H2 MFC set to  0.000000
6/23/2010	12:02:52 PM	BCl3 MFC set to  0.000000
6/23/2010	12:02:52 PM	PHl3 MFC set to  0.000000
6/23/2010	12:02:52 PM	SiCl4 MFC set to  0.000000
6/23/2010	12:02:52 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	12:02:52 PM	Tube furnace set to 0
6/23/2010	12:03:07 PM	Helium valve closed
6/23/2010	12:03:07 PM	H2 valve closed
6/23/2010	12:03:07 PM	BCl3 valve closed
6/23/2010	12:03:07 PM	PH3 valve closed
6/23/2010	12:03:07 PM	SiCl4 pre valve closed
6/23/2010	12:03:07 PM	SiCl4 post valve closed
6/23/2010	12:03:07 PM	Main Vac valve closed
6/23/2010	12:03:07 PM	Bubbler valve closed
6/23/2010	12:03:07 PM	Bypass valve opened
6/23/2010	12:03:07 PM	Helium MFC set to  0.000000
6/23/2010	12:03:07 PM	H2 MFC set to  0.000000
6/23/2010	12:03:07 PM	BCl3 MFC set to  0.000000
6/23/2010	12:03:07 PM	PHl3 MFC set to  0.000000
6/23/2010	12:03:07 PM	SiCl4 MFC set to  0.000000
6/23/2010	12:03:07 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	12:03:08 PM	Tube furnace set to 0
6/23/2010	12:03:41 PM	Helium valve closed
6/23/2010	12:03:41 PM	H2 valve closed
6/23/2010	12:03:41 PM	BCl3 valve closed
6/23/2010	12:03:41 PM	PH3 valve closed
6/23/2010	12:03:41 PM	SiCl4 pre valve closed
6/23/2010	12:03:41 PM	SiCl4 post valve closed
6/23/2010	12:03:41 PM	Bubbler valve closed
6/23/2010	12:03:41 PM	Main Vac valve opened
6/23/2010	12:03:41 PM	Bypass valve opened
6/23/2010	12:03:41 PM	Helium MFC set to  0.000000
6/23/2010	12:03:41 PM	H2 MFC set to  0.000000
6/23/2010	12:03:41 PM	BCl3 MFC set to  0.000000
6/23/2010	12:03:41 PM	PHl3 MFC set to  0.000000
6/23/2010	12:03:41 PM	SiCl4 MFC set to  0.000000
6/23/2010	12:03:41 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	12:03:42 PM	Tube furnace set to 0
6/23/2010	12:05:05 PM	Helium valve closed
6/23/2010	12:05:05 PM	H2 valve closed
6/23/2010	12:05:05 PM	BCl3 valve closed
6/23/2010	12:05:05 PM	PH3 valve closed
6/23/2010	12:05:05 PM	SiCl4 pre valve closed
6/23/2010	12:05:05 PM	SiCl4 post valve closed
6/23/2010	12:05:05 PM	Bubbler valve closed
6/23/2010	12:05:05 PM	Main Vac valve opened
6/23/2010	12:05:05 PM	Bypass valve opened
6/23/2010	12:05:05 PM	Helium MFC set to  0.000000
6/23/2010	12:05:05 PM	H2 MFC set to  0.000000
6/23/2010	12:05:05 PM	BCl3 MFC set to  0.000000
6/23/2010	12:05:05 PM	PHl3 MFC set to  0.000000
6/23/2010	12:05:05 PM	SiCl4 MFC set to  0.000000
6/23/2010	12:05:05 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	12:05:05 PM	Tube furnace set to 0
6/23/2010	12:05:06 PM	Run finished at 12:05 PM
6/23/2010	12:05:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/23/2010	12:12:10 PM	Helium MFC set to  100.000000
6/23/2010	12:12:12 PM	Helium valve opened
6/23/2010	12:18:47 PM	Helium valve closed
6/23/2010	12:19:59 PM	Helium valve opened
6/23/2010	12:25:23 PM	Helium valve closed
6/23/2010	12:37:50 PM	Recipe started at 12:37 PM
6/23/2010	12:37:50 PM	Helium valve closed
6/23/2010	12:37:50 PM	BCl3 valve closed
6/23/2010	12:37:50 PM	PH3 valve closed
6/23/2010	12:37:50 PM	SiCl4 pre valve closed
6/23/2010	12:37:50 PM	SiCl4 post valve closed
6/23/2010	12:37:50 PM	Main Vac valve closed
6/23/2010	12:37:50 PM	Bypass valve closed
6/23/2010	12:37:50 PM	Bubbler valve closed
6/23/2010	12:37:50 PM	H2 valve opened
6/23/2010	12:37:50 PM	Helium MFC set to  0.000000
6/23/2010	12:37:50 PM	H2 MFC set to  500.000000
6/23/2010	12:37:50 PM	BCl3 MFC set to  0.000000
6/23/2010	12:37:50 PM	PHl3 MFC set to  0.000000
6/23/2010	12:37:50 PM	SiCl4 MFC set to  0.000000
6/23/2010	12:37:50 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	12:37:50 PM	Tube furnace set to 0
6/23/2010	12:39:13 PM	Helium valve closed
6/23/2010	12:39:13 PM	BCl3 valve closed
6/23/2010	12:39:13 PM	PH3 valve closed
6/23/2010	12:39:13 PM	SiCl4 pre valve closed
6/23/2010	12:39:13 PM	SiCl4 post valve closed
6/23/2010	12:39:13 PM	Main Vac valve closed
6/23/2010	12:39:13 PM	Bypass valve closed
6/23/2010	12:39:13 PM	H2 valve opened
6/23/2010	12:39:13 PM	Bubbler valve opened
6/23/2010	12:39:13 PM	Helium MFC set to  0.000000
6/23/2010	12:39:13 PM	H2 MFC set to  500.000000
6/23/2010	12:39:13 PM	BCl3 MFC set to  0.000000
6/23/2010	12:39:13 PM	PHl3 MFC set to  0.000000
6/23/2010	12:39:13 PM	SiCl4 MFC set to  0.000000
6/23/2010	12:39:13 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	12:39:13 PM	Tube furnace set to 1000
6/23/2010	12:59:13 PM	Helium valve closed
6/23/2010	12:59:13 PM	BCl3 valve closed
6/23/2010	12:59:13 PM	Main Vac valve closed
6/23/2010	12:59:13 PM	Bypass valve closed
6/23/2010	12:59:13 PM	H2 valve opened
6/23/2010	12:59:13 PM	PH3 valve opened
6/23/2010	12:59:13 PM	SiCl4 pre valve opened
6/23/2010	12:59:13 PM	SiCl4 post valve opened
6/23/2010	12:59:13 PM	Bubbler valve opened
6/23/2010	12:59:13 PM	Helium MFC set to  0.000000
6/23/2010	12:59:13 PM	H2 MFC set to  500.000000
6/23/2010	12:59:13 PM	BCl3 MFC set to  0.000000
6/23/2010	12:59:13 PM	PHl3 MFC set to  1.000000
6/23/2010	12:59:13 PM	SiCl4 MFC set to  50.000000
6/23/2010	12:59:13 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	12:59:13 PM	Tube furnace set to 1000
6/23/2010	1:14:13 PM	H2 valve closed
6/23/2010	1:14:13 PM	BCl3 valve closed
6/23/2010	1:14:13 PM	PH3 valve closed
6/23/2010	1:14:13 PM	SiCl4 pre valve closed
6/23/2010	1:14:13 PM	SiCl4 post valve closed
6/23/2010	1:14:13 PM	Main Vac valve closed
6/23/2010	1:14:13 PM	Bypass valve closed
6/23/2010	1:14:13 PM	Helium valve opened
6/23/2010	1:14:13 PM	Bubbler valve opened
6/23/2010	1:14:13 PM	Helium MFC set to  500.000000
6/23/2010	1:14:13 PM	H2 MFC set to  0.000000
6/23/2010	1:14:13 PM	BCl3 MFC set to  0.000000
6/23/2010	1:14:13 PM	PHl3 MFC set to  0.000000
6/23/2010	1:14:13 PM	SiCl4 MFC set to  0.000000
6/23/2010	1:14:13 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	1:14:13 PM	Tube furnace set to 0
6/23/2010	1:34:13 PM	Helium valve closed
6/23/2010	1:34:13 PM	H2 valve closed
6/23/2010	1:34:13 PM	BCl3 valve closed
6/23/2010	1:34:13 PM	PH3 valve closed
6/23/2010	1:34:13 PM	SiCl4 pre valve closed
6/23/2010	1:34:13 PM	SiCl4 post valve closed
6/23/2010	1:34:13 PM	Main Vac valve closed
6/23/2010	1:34:13 PM	Bypass valve closed
6/23/2010	1:34:13 PM	Bubbler valve closed
6/23/2010	1:34:13 PM	Helium MFC set to  0.000000
6/23/2010	1:34:13 PM	H2 MFC set to  0.000000
6/23/2010	1:34:13 PM	BCl3 MFC set to  0.000000
6/23/2010	1:34:13 PM	PHl3 MFC set to  0.000000
6/23/2010	1:34:13 PM	SiCl4 MFC set to  0.000000
6/23/2010	1:34:13 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	1:34:13 PM	Tube furnace set to 0
6/23/2010	1:34:14 PM	Run finished at 1:34 PM
6/23/2010	1:54:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	1:54:59 PM	Recipe started at 1:54 PM
6/23/2010	1:54:59 PM	H2 valve closed
6/23/2010	1:54:59 PM	BCl3 valve closed
6/23/2010	1:54:59 PM	PH3 valve closed
6/23/2010	1:54:59 PM	SiCl4 pre valve closed
6/23/2010	1:54:59 PM	SiCl4 post valve closed
6/23/2010	1:54:59 PM	Main Vac valve closed
6/23/2010	1:54:59 PM	Bypass valve closed
6/23/2010	1:54:59 PM	Bubbler valve closed
6/23/2010	1:54:59 PM	Helium valve opened
6/23/2010	1:54:59 PM	Helium MFC set to  500.000000
6/23/2010	1:54:59 PM	H2 MFC set to  0.000000
6/23/2010	1:54:59 PM	BCl3 MFC set to  0.000000
6/23/2010	1:54:59 PM	PHl3 MFC set to  0.000000
6/23/2010	1:54:59 PM	SiCl4 MFC set to  0.000000
6/23/2010	1:54:59 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	1:55:00 PM	Tube furnace set to 0
6/23/2010	1:55:00 PM	Helium valve closed
6/23/2010	1:55:00 PM	H2 valve closed
6/23/2010	1:55:00 PM	BCl3 valve closed
6/23/2010	1:55:00 PM	PH3 valve closed
6/23/2010	1:55:00 PM	SiCl4 pre valve closed
6/23/2010	1:55:00 PM	SiCl4 post valve closed
6/23/2010	1:55:00 PM	Main Vac valve closed
6/23/2010	1:55:00 PM	Bypass valve closed
6/23/2010	1:55:00 PM	Bubbler valve closed
6/23/2010	1:55:00 PM	Helium MFC set to  0.000000
6/23/2010	1:55:00 PM	H2 MFC set to  0.000000
6/23/2010	1:55:00 PM	BCl3 MFC set to  0.000000
6/23/2010	1:55:00 PM	PHl3 MFC set to  0.000000
6/23/2010	1:55:00 PM	SiCl4 MFC set to  0.000000
6/23/2010	1:55:00 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	1:55:00 PM	Tube furnace set to 0
6/23/2010	1:55:00 PM	Run finished at 1:55 PM
6/23/2010	1:55:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	2:02:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	2:02:27 PM	Recipe started at 2:02 PM
6/23/2010	2:02:27 PM	Helium valve closed
6/23/2010	2:02:27 PM	H2 valve closed
6/23/2010	2:02:27 PM	BCl3 valve closed
6/23/2010	2:02:27 PM	PH3 valve closed
6/23/2010	2:02:27 PM	SiCl4 pre valve closed
6/23/2010	2:02:27 PM	SiCl4 post valve closed
6/23/2010	2:02:27 PM	Main Vac valve closed
6/23/2010	2:02:27 PM	Bubbler valve closed
6/23/2010	2:02:27 PM	Bypass valve opened
6/23/2010	2:02:27 PM	Helium MFC set to  0.000000
6/23/2010	2:02:27 PM	H2 MFC set to  0.000000
6/23/2010	2:02:27 PM	BCl3 MFC set to  0.000000
6/23/2010	2:02:27 PM	PHl3 MFC set to  0.000000
6/23/2010	2:02:27 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:02:27 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:02:27 PM	Tube furnace set to 0
6/23/2010	2:03:27 PM	Helium valve closed
6/23/2010	2:03:27 PM	H2 valve closed
6/23/2010	2:03:27 PM	BCl3 valve closed
6/23/2010	2:03:27 PM	PH3 valve closed
6/23/2010	2:03:27 PM	SiCl4 pre valve closed
6/23/2010	2:03:27 PM	SiCl4 post valve closed
6/23/2010	2:03:27 PM	Bubbler valve closed
6/23/2010	2:03:27 PM	Main Vac valve opened
6/23/2010	2:03:27 PM	Bypass valve opened
6/23/2010	2:03:27 PM	Helium MFC set to  0.000000
6/23/2010	2:03:27 PM	H2 MFC set to  0.000000
6/23/2010	2:03:27 PM	BCl3 MFC set to  0.000000
6/23/2010	2:03:27 PM	PHl3 MFC set to  0.000000
6/23/2010	2:03:27 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:03:27 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:03:27 PM	Tube furnace set to 0
6/23/2010	2:03:27 PM	Run finished at 2:03 PM
6/23/2010	2:03:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	2:25:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	2:25:09 PM	Recipe started at 2:25 PM
6/23/2010	2:25:09 PM	H2 valve closed
6/23/2010	2:25:09 PM	BCl3 valve closed
6/23/2010	2:25:09 PM	PH3 valve closed
6/23/2010	2:25:09 PM	SiCl4 pre valve closed
6/23/2010	2:25:09 PM	SiCl4 post valve closed
6/23/2010	2:25:09 PM	Main Vac valve closed
6/23/2010	2:25:09 PM	Bypass valve closed
6/23/2010	2:25:10 PM	Bubbler valve closed
6/23/2010	2:25:10 PM	Helium valve opened
6/23/2010	2:25:10 PM	Helium MFC set to  500.000000
6/23/2010	2:25:10 PM	H2 MFC set to  0.000000
6/23/2010	2:25:10 PM	BCl3 MFC set to  0.000000
6/23/2010	2:25:10 PM	PHl3 MFC set to  0.000000
6/23/2010	2:25:10 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:25:10 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:25:10 PM	Tube furnace set to 0
6/23/2010	2:26:20 PM	Helium valve closed
6/23/2010	2:26:20 PM	H2 valve closed
6/23/2010	2:26:20 PM	BCl3 valve closed
6/23/2010	2:26:20 PM	PH3 valve closed
6/23/2010	2:26:20 PM	SiCl4 pre valve closed
6/23/2010	2:26:20 PM	SiCl4 post valve closed
6/23/2010	2:26:20 PM	Main Vac valve closed
6/23/2010	2:26:20 PM	Bypass valve closed
6/23/2010	2:26:20 PM	Bubbler valve closed
6/23/2010	2:26:20 PM	Helium MFC set to  0.000000
6/23/2010	2:26:20 PM	H2 MFC set to  0.000000
6/23/2010	2:26:20 PM	BCl3 MFC set to  0.000000
6/23/2010	2:26:20 PM	PHl3 MFC set to  0.000000
6/23/2010	2:26:20 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:26:20 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:26:20 PM	Tube furnace set to 0
6/23/2010	2:26:20 PM	Run finished at 2:26 PM
6/23/2010	2:26:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/23/2010	2:29:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/23/2010	2:30:03 PM	Recipe started at 2:30 PM
6/23/2010	2:30:03 PM	H2 valve closed
6/23/2010	2:30:03 PM	BCl3 valve closed
6/23/2010	2:30:03 PM	PH3 valve closed
6/23/2010	2:30:03 PM	SiCl4 pre valve closed
6/23/2010	2:30:03 PM	SiCl4 post valve closed
6/23/2010	2:30:03 PM	Main Vac valve closed
6/23/2010	2:30:03 PM	Bypass valve closed
6/23/2010	2:30:03 PM	Bubbler valve closed
6/23/2010	2:30:03 PM	Helium valve opened
6/23/2010	2:30:03 PM	Helium MFC set to  500.000000
6/23/2010	2:30:03 PM	H2 MFC set to  0.000000
6/23/2010	2:30:03 PM	BCl3 MFC set to  0.000000
6/23/2010	2:30:03 PM	PHl3 MFC set to  0.000000
6/23/2010	2:30:03 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:30:03 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:30:03 PM	Tube furnace set to 0
6/23/2010	2:30:05 PM	Helium valve closed
6/23/2010	2:30:05 PM	H2 valve closed
6/23/2010	2:30:05 PM	BCl3 valve closed
6/23/2010	2:30:05 PM	PH3 valve closed
6/23/2010	2:30:05 PM	SiCl4 pre valve closed
6/23/2010	2:30:05 PM	SiCl4 post valve closed
6/23/2010	2:30:05 PM	Main Vac valve closed
6/23/2010	2:30:05 PM	Bypass valve closed
6/23/2010	2:30:05 PM	Bubbler valve closed
6/23/2010	2:30:05 PM	Helium MFC set to  0.000000
6/23/2010	2:30:05 PM	H2 MFC set to  0.000000
6/23/2010	2:30:05 PM	BCl3 MFC set to  0.000000
6/23/2010	2:30:05 PM	PHl3 MFC set to  0.000000
6/23/2010	2:30:05 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:30:05 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:30:06 PM	Tube furnace set to 0
6/23/2010	2:30:21 PM	Helium valve closed
6/23/2010	2:30:21 PM	H2 valve closed
6/23/2010	2:30:21 PM	BCl3 valve closed
6/23/2010	2:30:21 PM	PH3 valve closed
6/23/2010	2:30:21 PM	SiCl4 pre valve closed
6/23/2010	2:30:21 PM	SiCl4 post valve closed
6/23/2010	2:30:21 PM	Main Vac valve closed
6/23/2010	2:30:21 PM	Bubbler valve closed
6/23/2010	2:30:21 PM	Bypass valve opened
6/23/2010	2:30:21 PM	Helium MFC set to  0.000000
6/23/2010	2:30:21 PM	H2 MFC set to  0.000000
6/23/2010	2:30:21 PM	BCl3 MFC set to  0.000000
6/23/2010	2:30:21 PM	PHl3 MFC set to  0.000000
6/23/2010	2:30:21 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:30:21 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:30:21 PM	Tube furnace set to 0
6/23/2010	2:31:06 PM	Helium valve closed
6/23/2010	2:31:06 PM	H2 valve closed
6/23/2010	2:31:06 PM	BCl3 valve closed
6/23/2010	2:31:06 PM	PH3 valve closed
6/23/2010	2:31:06 PM	SiCl4 pre valve closed
6/23/2010	2:31:06 PM	SiCl4 post valve closed
6/23/2010	2:31:06 PM	Bubbler valve closed
6/23/2010	2:31:06 PM	Main Vac valve opened
6/23/2010	2:31:06 PM	Bypass valve opened
6/23/2010	2:31:06 PM	Helium MFC set to  0.000000
6/23/2010	2:31:06 PM	H2 MFC set to  0.000000
6/23/2010	2:31:06 PM	BCl3 MFC set to  0.000000
6/23/2010	2:31:06 PM	PHl3 MFC set to  0.000000
6/23/2010	2:31:06 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:31:06 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:31:06 PM	Tube furnace set to 0
6/23/2010	2:36:06 PM	H2 valve closed
6/23/2010	2:36:06 PM	BCl3 valve closed
6/23/2010	2:36:06 PM	PH3 valve closed
6/23/2010	2:36:06 PM	SiCl4 pre valve closed
6/23/2010	2:36:06 PM	SiCl4 post valve closed
6/23/2010	2:36:06 PM	Main Vac valve closed
6/23/2010	2:36:06 PM	Bypass valve closed
6/23/2010	2:36:06 PM	Bubbler valve closed
6/23/2010	2:36:06 PM	Helium valve opened
6/23/2010	2:36:06 PM	Helium MFC set to  500.000000
6/23/2010	2:36:06 PM	H2 MFC set to  0.000000
6/23/2010	2:36:06 PM	BCl3 MFC set to  0.000000
6/23/2010	2:36:06 PM	PHl3 MFC set to  0.000000
6/23/2010	2:36:06 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:36:06 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:36:06 PM	Tube furnace set to 0
6/23/2010	2:37:26 PM	Helium valve closed
6/23/2010	2:37:26 PM	H2 valve closed
6/23/2010	2:37:26 PM	BCl3 valve closed
6/23/2010	2:37:26 PM	PH3 valve closed
6/23/2010	2:37:26 PM	SiCl4 pre valve closed
6/23/2010	2:37:26 PM	SiCl4 post valve closed
6/23/2010	2:37:26 PM	Main Vac valve closed
6/23/2010	2:37:26 PM	Bypass valve closed
6/23/2010	2:37:26 PM	Bubbler valve closed
6/23/2010	2:37:26 PM	Helium MFC set to  0.000000
6/23/2010	2:37:26 PM	H2 MFC set to  0.000000
6/23/2010	2:37:26 PM	BCl3 MFC set to  0.000000
6/23/2010	2:37:26 PM	PHl3 MFC set to  0.000000
6/23/2010	2:37:26 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:37:26 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:37:26 PM	Tube furnace set to 0
6/23/2010	2:37:41 PM	Helium valve closed
6/23/2010	2:37:41 PM	H2 valve closed
6/23/2010	2:37:41 PM	BCl3 valve closed
6/23/2010	2:37:41 PM	PH3 valve closed
6/23/2010	2:37:41 PM	SiCl4 pre valve closed
6/23/2010	2:37:41 PM	SiCl4 post valve closed
6/23/2010	2:37:41 PM	Main Vac valve closed
6/23/2010	2:37:41 PM	Bubbler valve closed
6/23/2010	2:37:41 PM	Bypass valve opened
6/23/2010	2:37:41 PM	Helium MFC set to  0.000000
6/23/2010	2:37:41 PM	H2 MFC set to  0.000000
6/23/2010	2:37:41 PM	BCl3 MFC set to  0.000000
6/23/2010	2:37:41 PM	PHl3 MFC set to  0.000000
6/23/2010	2:37:41 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:37:41 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:37:42 PM	Tube furnace set to 0
6/23/2010	2:38:15 PM	Helium valve closed
6/23/2010	2:38:15 PM	H2 valve closed
6/23/2010	2:38:15 PM	BCl3 valve closed
6/23/2010	2:38:15 PM	PH3 valve closed
6/23/2010	2:38:15 PM	SiCl4 pre valve closed
6/23/2010	2:38:15 PM	SiCl4 post valve closed
6/23/2010	2:38:15 PM	Bubbler valve closed
6/23/2010	2:38:15 PM	Main Vac valve opened
6/23/2010	2:38:15 PM	Bypass valve opened
6/23/2010	2:38:15 PM	Helium MFC set to  0.000000
6/23/2010	2:38:15 PM	H2 MFC set to  0.000000
6/23/2010	2:38:15 PM	BCl3 MFC set to  0.000000
6/23/2010	2:38:15 PM	PHl3 MFC set to  0.000000
6/23/2010	2:38:15 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:38:15 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:38:15 PM	Tube furnace set to 0
6/23/2010	2:43:15 PM	H2 valve closed
6/23/2010	2:43:15 PM	BCl3 valve closed
6/23/2010	2:43:15 PM	PH3 valve closed
6/23/2010	2:43:15 PM	SiCl4 pre valve closed
6/23/2010	2:43:15 PM	SiCl4 post valve closed
6/23/2010	2:43:15 PM	Main Vac valve closed
6/23/2010	2:43:15 PM	Bypass valve closed
6/23/2010	2:43:15 PM	Bubbler valve closed
6/23/2010	2:43:15 PM	Helium valve opened
6/23/2010	2:43:15 PM	Helium MFC set to  500.000000
6/23/2010	2:43:15 PM	H2 MFC set to  0.000000
6/23/2010	2:43:15 PM	BCl3 MFC set to  0.000000
6/23/2010	2:43:15 PM	PHl3 MFC set to  0.000000
6/23/2010	2:43:15 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:43:15 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:43:15 PM	Tube furnace set to 0
6/23/2010	2:44:34 PM	Helium valve closed
6/23/2010	2:44:34 PM	H2 valve closed
6/23/2010	2:44:34 PM	BCl3 valve closed
6/23/2010	2:44:34 PM	PH3 valve closed
6/23/2010	2:44:34 PM	SiCl4 pre valve closed
6/23/2010	2:44:34 PM	SiCl4 post valve closed
6/23/2010	2:44:34 PM	Main Vac valve closed
6/23/2010	2:44:34 PM	Bypass valve closed
6/23/2010	2:44:34 PM	Bubbler valve closed
6/23/2010	2:44:34 PM	Helium MFC set to  0.000000
6/23/2010	2:44:34 PM	H2 MFC set to  0.000000
6/23/2010	2:44:34 PM	BCl3 MFC set to  0.000000
6/23/2010	2:44:34 PM	PHl3 MFC set to  0.000000
6/23/2010	2:44:34 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:44:34 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:44:35 PM	Tube furnace set to 0
6/23/2010	2:44:50 PM	Helium valve closed
6/23/2010	2:44:50 PM	H2 valve closed
6/23/2010	2:44:50 PM	BCl3 valve closed
6/23/2010	2:44:50 PM	PH3 valve closed
6/23/2010	2:44:50 PM	SiCl4 pre valve closed
6/23/2010	2:44:50 PM	SiCl4 post valve closed
6/23/2010	2:44:50 PM	Main Vac valve closed
6/23/2010	2:44:50 PM	Bubbler valve closed
6/23/2010	2:44:50 PM	Bypass valve opened
6/23/2010	2:44:50 PM	Helium MFC set to  0.000000
6/23/2010	2:44:50 PM	H2 MFC set to  0.000000
6/23/2010	2:44:50 PM	BCl3 MFC set to  0.000000
6/23/2010	2:44:50 PM	PHl3 MFC set to  0.000000
6/23/2010	2:44:50 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:44:50 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:44:50 PM	Tube furnace set to 0
6/23/2010	2:45:23 PM	Helium valve closed
6/23/2010	2:45:23 PM	H2 valve closed
6/23/2010	2:45:23 PM	BCl3 valve closed
6/23/2010	2:45:23 PM	PH3 valve closed
6/23/2010	2:45:23 PM	SiCl4 pre valve closed
6/23/2010	2:45:23 PM	SiCl4 post valve closed
6/23/2010	2:45:23 PM	Bubbler valve closed
6/23/2010	2:45:23 PM	Main Vac valve opened
6/23/2010	2:45:23 PM	Bypass valve opened
6/23/2010	2:45:23 PM	Helium MFC set to  0.000000
6/23/2010	2:45:23 PM	H2 MFC set to  0.000000
6/23/2010	2:45:23 PM	BCl3 MFC set to  0.000000
6/23/2010	2:45:23 PM	PHl3 MFC set to  0.000000
6/23/2010	2:45:23 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:45:23 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:45:23 PM	Tube furnace set to 0
6/23/2010	2:50:23 PM	Helium valve closed
6/23/2010	2:50:23 PM	H2 valve closed
6/23/2010	2:50:23 PM	BCl3 valve closed
6/23/2010	2:50:23 PM	PH3 valve closed
6/23/2010	2:50:23 PM	SiCl4 pre valve closed
6/23/2010	2:50:23 PM	SiCl4 post valve closed
6/23/2010	2:50:23 PM	Bubbler valve closed
6/23/2010	2:50:23 PM	Main Vac valve opened
6/23/2010	2:50:23 PM	Bypass valve opened
6/23/2010	2:50:23 PM	Helium MFC set to  0.000000
6/23/2010	2:50:23 PM	H2 MFC set to  0.000000
6/23/2010	2:50:23 PM	BCl3 MFC set to  0.000000
6/23/2010	2:50:23 PM	PHl3 MFC set to  0.000000
6/23/2010	2:50:23 PM	SiCl4 MFC set to  0.000000
6/23/2010	2:50:23 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	2:50:23 PM	Tube furnace set to 0
6/23/2010	2:50:24 PM	Run finished at 2:50 PM
6/23/2010	2:50:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/23/2010	3:11:17 PM	Helium MFC set to  100.000000
6/23/2010	3:11:20 PM	Helium valve opened
6/23/2010	3:20:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	3:20:46 PM	Recipe started at 3:20 PM
6/23/2010	3:20:46 PM	Helium valve closed
6/23/2010	3:20:46 PM	H2 valve closed
6/23/2010	3:20:46 PM	BCl3 valve closed
6/23/2010	3:20:46 PM	PH3 valve closed
6/23/2010	3:20:46 PM	SiCl4 pre valve closed
6/23/2010	3:20:46 PM	SiCl4 post valve closed
6/23/2010	3:20:46 PM	Main Vac valve closed
6/23/2010	3:20:46 PM	Bubbler valve closed
6/23/2010	3:20:46 PM	Bypass valve opened
6/23/2010	3:20:46 PM	Helium MFC set to  0.000000
6/23/2010	3:20:46 PM	H2 MFC set to  0.000000
6/23/2010	3:20:46 PM	BCl3 MFC set to  0.000000
6/23/2010	3:20:46 PM	PHl3 MFC set to  0.000000
6/23/2010	3:20:46 PM	SiCl4 MFC set to  0.000000
6/23/2010	3:20:46 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	3:20:46 PM	Tube furnace set to 0
6/23/2010	3:20:47 PM	Helium valve closed
6/23/2010	3:20:47 PM	H2 valve closed
6/23/2010	3:20:47 PM	BCl3 valve closed
6/23/2010	3:20:47 PM	PH3 valve closed
6/23/2010	3:20:47 PM	SiCl4 pre valve closed
6/23/2010	3:20:47 PM	SiCl4 post valve closed
6/23/2010	3:20:47 PM	Bubbler valve closed
6/23/2010	3:20:47 PM	Main Vac valve opened
6/23/2010	3:20:47 PM	Bypass valve opened
6/23/2010	3:20:47 PM	Helium MFC set to  0.000000
6/23/2010	3:20:47 PM	H2 MFC set to  0.000000
6/23/2010	3:20:47 PM	BCl3 MFC set to  0.000000
6/23/2010	3:20:47 PM	PHl3 MFC set to  0.000000
6/23/2010	3:20:47 PM	SiCl4 MFC set to  0.000000
6/23/2010	3:20:47 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	3:20:47 PM	Tube furnace set to 0
6/23/2010	3:20:47 PM	Run finished at 3:20 PM
6/23/2010	3:20:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	3:22:01 PM	Helium valve opened
6/23/2010	3:22:03 PM	Helium valve closed
6/23/2010	3:22:09 PM	Helium MFC set to  100.000000
6/23/2010	3:22:10 PM	Helium valve opened
6/23/2010	3:28:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	3:28:12 PM	Recipe started at 3:28 PM
6/23/2010	3:28:12 PM	Helium valve closed
6/23/2010	3:28:12 PM	H2 valve closed
6/23/2010	3:28:12 PM	BCl3 valve closed
6/23/2010	3:28:12 PM	PH3 valve closed
6/23/2010	3:28:12 PM	SiCl4 pre valve closed
6/23/2010	3:28:12 PM	SiCl4 post valve closed
6/23/2010	3:28:12 PM	Main Vac valve closed
6/23/2010	3:28:12 PM	Bubbler valve closed
6/23/2010	3:28:12 PM	Bypass valve opened
6/23/2010	3:28:12 PM	Helium MFC set to  0.000000
6/23/2010	3:28:12 PM	H2 MFC set to  0.000000
6/23/2010	3:28:12 PM	BCl3 MFC set to  0.000000
6/23/2010	3:28:12 PM	PHl3 MFC set to  0.000000
6/23/2010	3:28:12 PM	SiCl4 MFC set to  0.000000
6/23/2010	3:28:12 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	3:28:12 PM	Tube furnace set to 0
6/23/2010	3:28:12 PM	Helium valve closed
6/23/2010	3:28:12 PM	H2 valve closed
6/23/2010	3:28:12 PM	BCl3 valve closed
6/23/2010	3:28:12 PM	PH3 valve closed
6/23/2010	3:28:12 PM	SiCl4 pre valve closed
6/23/2010	3:28:12 PM	SiCl4 post valve closed
6/23/2010	3:28:12 PM	Bubbler valve closed
6/23/2010	3:28:12 PM	Main Vac valve opened
6/23/2010	3:28:12 PM	Bypass valve opened
6/23/2010	3:28:12 PM	Helium MFC set to  0.000000
6/23/2010	3:28:12 PM	H2 MFC set to  0.000000
6/23/2010	3:28:12 PM	BCl3 MFC set to  0.000000
6/23/2010	3:28:12 PM	PHl3 MFC set to  0.000000
6/23/2010	3:28:12 PM	SiCl4 MFC set to  0.000000
6/23/2010	3:28:12 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	3:28:12 PM	Tube furnace set to 0
6/23/2010	3:28:13 PM	Run finished at 3:28 PM
6/23/2010	3:28:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	3:38:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	3:38:21 PM	Recipe started at 3:38 PM
6/23/2010	3:38:21 PM	Helium valve closed
6/23/2010	3:38:21 PM	H2 valve closed
6/23/2010	3:38:21 PM	BCl3 valve closed
6/23/2010	3:38:21 PM	PH3 valve closed
6/23/2010	3:38:21 PM	SiCl4 pre valve closed
6/23/2010	3:38:21 PM	SiCl4 post valve closed
6/23/2010	3:38:21 PM	Main Vac valve closed
6/23/2010	3:38:21 PM	Bubbler valve closed
6/23/2010	3:38:21 PM	Bypass valve opened
6/23/2010	3:38:21 PM	Helium MFC set to  0.000000
6/23/2010	3:38:21 PM	H2 MFC set to  0.000000
6/23/2010	3:38:21 PM	BCl3 MFC set to  0.000000
6/23/2010	3:38:21 PM	PHl3 MFC set to  0.000000
6/23/2010	3:38:21 PM	SiCl4 MFC set to  0.000000
6/23/2010	3:38:21 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	3:38:21 PM	Tube furnace set to 0
6/23/2010	3:38:21 PM	Helium valve closed
6/23/2010	3:38:21 PM	H2 valve closed
6/23/2010	3:38:21 PM	BCl3 valve closed
6/23/2010	3:38:21 PM	PH3 valve closed
6/23/2010	3:38:21 PM	SiCl4 pre valve closed
6/23/2010	3:38:21 PM	SiCl4 post valve closed
6/23/2010	3:38:21 PM	Bubbler valve closed
6/23/2010	3:38:21 PM	Main Vac valve opened
6/23/2010	3:38:21 PM	Bypass valve opened
6/23/2010	3:38:21 PM	Helium MFC set to  0.000000
6/23/2010	3:38:21 PM	H2 MFC set to  0.000000
6/23/2010	3:38:21 PM	BCl3 MFC set to  0.000000
6/23/2010	3:38:21 PM	PHl3 MFC set to  0.000000
6/23/2010	3:38:21 PM	SiCl4 MFC set to  0.000000
6/23/2010	3:38:21 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	3:38:21 PM	Tube furnace set to 0
6/23/2010	3:38:22 PM	Run finished at 3:38 PM
6/23/2010	3:38:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	3:38:36 PM	Helium MFC set to  100.000000
6/23/2010	3:38:36 PM	Helium valve opened
6/23/2010	3:49:35 PM	Helium valve closed
6/23/2010	3:49:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	3:49:36 PM	Recipe started at 3:49 PM
6/23/2010	3:49:36 PM	Helium valve closed
6/23/2010	3:49:36 PM	H2 valve closed
6/23/2010	3:49:36 PM	BCl3 valve closed
6/23/2010	3:49:36 PM	PH3 valve closed
6/23/2010	3:49:36 PM	SiCl4 pre valve closed
6/23/2010	3:49:36 PM	SiCl4 post valve closed
6/23/2010	3:49:36 PM	Main Vac valve closed
6/23/2010	3:49:37 PM	Bubbler valve closed
6/23/2010	3:49:37 PM	Bypass valve opened
6/23/2010	3:49:37 PM	Helium MFC set to  0.000000
6/23/2010	3:49:37 PM	H2 MFC set to  0.000000
6/23/2010	3:49:37 PM	BCl3 MFC set to  0.000000
6/23/2010	3:49:37 PM	PHl3 MFC set to  0.000000
6/23/2010	3:49:37 PM	SiCl4 MFC set to  0.000000
6/23/2010	3:49:37 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	3:49:37 PM	Tube furnace set to 0
6/23/2010	3:49:37 PM	Helium valve closed
6/23/2010	3:49:37 PM	H2 valve closed
6/23/2010	3:49:37 PM	BCl3 valve closed
6/23/2010	3:49:37 PM	PH3 valve closed
6/23/2010	3:49:37 PM	SiCl4 pre valve closed
6/23/2010	3:49:37 PM	SiCl4 post valve closed
6/23/2010	3:49:37 PM	Bubbler valve closed
6/23/2010	3:49:37 PM	Main Vac valve opened
6/23/2010	3:49:37 PM	Bypass valve opened
6/23/2010	3:49:37 PM	Helium MFC set to  0.000000
6/23/2010	3:49:37 PM	H2 MFC set to  0.000000
6/23/2010	3:49:37 PM	BCl3 MFC set to  0.000000
6/23/2010	3:49:37 PM	PHl3 MFC set to  0.000000
6/23/2010	3:49:37 PM	SiCl4 MFC set to  0.000000
6/23/2010	3:49:37 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	3:49:37 PM	Tube furnace set to 0
6/23/2010	3:49:37 PM	Run finished at 3:49 PM
6/23/2010	3:49:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	4:08:44 PM	Helium MFC set to  100.000000
6/23/2010	4:08:45 PM	Helium valve opened
6/23/2010	4:15:27 PM	Helium valve closed
6/23/2010	4:15:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	4:15:29 PM	Recipe started at 4:15 PM
6/23/2010	4:15:29 PM	Helium valve closed
6/23/2010	4:15:29 PM	H2 valve closed
6/23/2010	4:15:29 PM	BCl3 valve closed
6/23/2010	4:15:29 PM	PH3 valve closed
6/23/2010	4:15:29 PM	SiCl4 pre valve closed
6/23/2010	4:15:29 PM	SiCl4 post valve closed
6/23/2010	4:15:29 PM	Main Vac valve closed
6/23/2010	4:15:29 PM	Bubbler valve closed
6/23/2010	4:15:29 PM	Bypass valve opened
6/23/2010	4:15:29 PM	Helium MFC set to  0.000000
6/23/2010	4:15:29 PM	H2 MFC set to  0.000000
6/23/2010	4:15:29 PM	BCl3 MFC set to  0.000000
6/23/2010	4:15:29 PM	PHl3 MFC set to  0.000000
6/23/2010	4:15:29 PM	SiCl4 MFC set to  0.000000
6/23/2010	4:15:29 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	4:15:29 PM	Tube furnace set to 0
6/23/2010	4:15:29 PM	Helium valve closed
6/23/2010	4:15:29 PM	H2 valve closed
6/23/2010	4:15:29 PM	BCl3 valve closed
6/23/2010	4:15:29 PM	PH3 valve closed
6/23/2010	4:15:29 PM	SiCl4 pre valve closed
6/23/2010	4:15:29 PM	SiCl4 post valve closed
6/23/2010	4:15:29 PM	Bubbler valve closed
6/23/2010	4:15:29 PM	Main Vac valve opened
6/23/2010	4:15:29 PM	Bypass valve opened
6/23/2010	4:15:29 PM	Helium MFC set to  0.000000
6/23/2010	4:15:29 PM	H2 MFC set to  0.000000
6/23/2010	4:15:29 PM	BCl3 MFC set to  0.000000
6/23/2010	4:15:29 PM	PHl3 MFC set to  0.000000
6/23/2010	4:15:29 PM	SiCl4 MFC set to  0.000000
6/23/2010	4:15:29 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	4:15:29 PM	Tube furnace set to 0
6/23/2010	4:15:30 PM	Run finished at 4:15 PM
6/23/2010	4:15:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	7:09:01 PM	Recipe started at 7:09 PM
6/23/2010	7:09:01 PM	Helium valve closed
6/23/2010	7:09:01 PM	BCl3 valve closed
6/23/2010	7:09:01 PM	PH3 valve closed
6/23/2010	7:09:01 PM	SiCl4 pre valve closed
6/23/2010	7:09:01 PM	SiCl4 post valve closed
6/23/2010	7:09:01 PM	Main Vac valve closed
6/23/2010	7:09:01 PM	Bypass valve closed
6/23/2010	7:09:01 PM	Bubbler valve closed
6/23/2010	7:09:01 PM	H2 valve opened
6/23/2010	7:09:01 PM	Helium MFC set to  0.000000
6/23/2010	7:09:01 PM	H2 MFC set to  500.000000
6/23/2010	7:09:01 PM	BCl3 MFC set to  0.000000
6/23/2010	7:09:01 PM	PHl3 MFC set to  0.000000
6/23/2010	7:09:01 PM	SiCl4 MFC set to  0.000000
6/23/2010	7:09:01 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	7:09:01 PM	Tube furnace set to 0
6/23/2010	7:10:23 PM	Helium valve closed
6/23/2010	7:10:23 PM	BCl3 valve closed
6/23/2010	7:10:23 PM	PH3 valve closed
6/23/2010	7:10:23 PM	SiCl4 pre valve closed
6/23/2010	7:10:23 PM	SiCl4 post valve closed
6/23/2010	7:10:23 PM	Main Vac valve closed
6/23/2010	7:10:23 PM	Bypass valve closed
6/23/2010	7:10:23 PM	H2 valve opened
6/23/2010	7:10:23 PM	Bubbler valve opened
6/23/2010	7:10:23 PM	Helium MFC set to  0.000000
6/23/2010	7:10:23 PM	H2 MFC set to  500.000000
6/23/2010	7:10:23 PM	BCl3 MFC set to  0.000000
6/23/2010	7:10:23 PM	PHl3 MFC set to  0.000000
6/23/2010	7:10:23 PM	SiCl4 MFC set to  0.000000
6/23/2010	7:10:23 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	7:10:23 PM	Tube furnace set to 1000
6/23/2010	7:30:23 PM	Helium valve closed
6/23/2010	7:30:23 PM	BCl3 valve closed
6/23/2010	7:30:23 PM	Main Vac valve closed
6/23/2010	7:30:23 PM	Bypass valve closed
6/23/2010	7:30:23 PM	H2 valve opened
6/23/2010	7:30:23 PM	PH3 valve opened
6/23/2010	7:30:23 PM	SiCl4 pre valve opened
6/23/2010	7:30:23 PM	SiCl4 post valve opened
6/23/2010	7:30:23 PM	Bubbler valve opened
6/23/2010	7:30:23 PM	Helium MFC set to  0.000000
6/23/2010	7:30:23 PM	H2 MFC set to  500.000000
6/23/2010	7:30:23 PM	BCl3 MFC set to  0.000000
6/23/2010	7:30:23 PM	PHl3 MFC set to  0.200000
6/23/2010	7:30:23 PM	SiCl4 MFC set to  50.000000
6/23/2010	7:30:23 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	7:30:24 PM	Tube furnace set to 1000
6/23/2010	7:45:24 PM	H2 valve closed
6/23/2010	7:45:24 PM	BCl3 valve closed
6/23/2010	7:45:24 PM	PH3 valve closed
6/23/2010	7:45:24 PM	SiCl4 pre valve closed
6/23/2010	7:45:24 PM	SiCl4 post valve closed
6/23/2010	7:45:24 PM	Main Vac valve closed
6/23/2010	7:45:24 PM	Bypass valve closed
6/23/2010	7:45:24 PM	Helium valve opened
6/23/2010	7:45:24 PM	Bubbler valve opened
6/23/2010	7:45:24 PM	Helium MFC set to  500.000000
6/23/2010	7:45:24 PM	H2 MFC set to  0.000000
6/23/2010	7:45:24 PM	BCl3 MFC set to  0.000000
6/23/2010	7:45:24 PM	PHl3 MFC set to  0.000000
6/23/2010	7:45:24 PM	SiCl4 MFC set to  0.000000
6/23/2010	7:45:24 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	7:45:24 PM	Tube furnace set to 0
6/23/2010	8:05:24 PM	Helium valve closed
6/23/2010	8:05:24 PM	H2 valve closed
6/23/2010	8:05:24 PM	BCl3 valve closed
6/23/2010	8:05:24 PM	PH3 valve closed
6/23/2010	8:05:24 PM	SiCl4 pre valve closed
6/23/2010	8:05:24 PM	SiCl4 post valve closed
6/23/2010	8:05:24 PM	Main Vac valve closed
6/23/2010	8:05:24 PM	Bypass valve closed
6/23/2010	8:05:24 PM	Bubbler valve closed
6/23/2010	8:05:24 PM	Helium MFC set to  0.000000
6/23/2010	8:05:24 PM	H2 MFC set to  0.000000
6/23/2010	8:05:24 PM	BCl3 MFC set to  0.000000
6/23/2010	8:05:24 PM	PHl3 MFC set to  0.000000
6/23/2010	8:05:24 PM	SiCl4 MFC set to  0.000000
6/23/2010	8:05:24 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	8:05:24 PM	Tube furnace set to 0
6/23/2010	8:05:24 PM	Run finished at 8:05 PM
6/23/2010	8:47:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/23/2010	8:47:06 PM	Recipe started at 8:47 PM
6/23/2010	8:47:06 PM	H2 valve closed
6/23/2010	8:47:06 PM	BCl3 valve closed
6/23/2010	8:47:06 PM	PH3 valve closed
6/23/2010	8:47:06 PM	SiCl4 pre valve closed
6/23/2010	8:47:06 PM	SiCl4 post valve closed
6/23/2010	8:47:06 PM	Main Vac valve closed
6/23/2010	8:47:06 PM	Bypass valve closed
6/23/2010	8:47:06 PM	Bubbler valve closed
6/23/2010	8:47:06 PM	Helium valve opened
6/23/2010	8:47:06 PM	Helium MFC set to  500.000000
6/23/2010	8:47:06 PM	H2 MFC set to  0.000000
6/23/2010	8:47:06 PM	BCl3 MFC set to  0.000000
6/23/2010	8:47:06 PM	PHl3 MFC set to  0.000000
6/23/2010	8:47:06 PM	SiCl4 MFC set to  0.000000
6/23/2010	8:47:06 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	8:47:06 PM	Tube furnace set to 0
6/23/2010	8:47:08 PM	Helium valve closed
6/23/2010	8:47:08 PM	H2 valve closed
6/23/2010	8:47:08 PM	BCl3 valve closed
6/23/2010	8:47:08 PM	PH3 valve closed
6/23/2010	8:47:08 PM	SiCl4 pre valve closed
6/23/2010	8:47:08 PM	SiCl4 post valve closed
6/23/2010	8:47:08 PM	Main Vac valve closed
6/23/2010	8:47:08 PM	Bypass valve closed
6/23/2010	8:47:08 PM	Bubbler valve closed
6/23/2010	8:47:08 PM	Helium MFC set to  0.000000
6/23/2010	8:47:08 PM	H2 MFC set to  0.000000
6/23/2010	8:47:08 PM	BCl3 MFC set to  0.000000
6/23/2010	8:47:08 PM	PHl3 MFC set to  0.000000
6/23/2010	8:47:08 PM	SiCl4 MFC set to  0.000000
6/23/2010	8:47:08 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	8:47:09 PM	Tube furnace set to 0
6/23/2010	8:47:24 PM	Helium valve closed
6/23/2010	8:47:24 PM	H2 valve closed
6/23/2010	8:47:24 PM	BCl3 valve closed
6/23/2010	8:47:24 PM	PH3 valve closed
6/23/2010	8:47:24 PM	SiCl4 pre valve closed
6/23/2010	8:47:24 PM	SiCl4 post valve closed
6/23/2010	8:47:24 PM	Main Vac valve closed
6/23/2010	8:47:24 PM	Bubbler valve closed
6/23/2010	8:47:24 PM	Bypass valve opened
6/23/2010	8:47:24 PM	Helium MFC set to  0.000000
6/23/2010	8:47:24 PM	H2 MFC set to  0.000000
6/23/2010	8:47:24 PM	BCl3 MFC set to  0.000000
6/23/2010	8:47:24 PM	PHl3 MFC set to  0.000000
6/23/2010	8:47:24 PM	SiCl4 MFC set to  0.000000
6/23/2010	8:47:24 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	8:47:24 PM	Tube furnace set to 0
6/23/2010	8:48:13 PM	Helium valve closed
6/23/2010	8:48:13 PM	H2 valve closed
6/23/2010	8:48:13 PM	BCl3 valve closed
6/23/2010	8:48:13 PM	PH3 valve closed
6/23/2010	8:48:13 PM	SiCl4 pre valve closed
6/23/2010	8:48:13 PM	SiCl4 post valve closed
6/23/2010	8:48:13 PM	Bubbler valve closed
6/23/2010	8:48:13 PM	Main Vac valve opened
6/23/2010	8:48:13 PM	Bypass valve opened
6/23/2010	8:48:13 PM	Helium MFC set to  0.000000
6/23/2010	8:48:13 PM	H2 MFC set to  0.000000
6/23/2010	8:48:13 PM	BCl3 MFC set to  0.000000
6/23/2010	8:48:13 PM	PHl3 MFC set to  0.000000
6/23/2010	8:48:13 PM	SiCl4 MFC set to  0.000000
6/23/2010	8:48:13 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	8:48:13 PM	Tube furnace set to 0
6/23/2010	8:53:13 PM	H2 valve closed
6/23/2010	8:53:13 PM	BCl3 valve closed
6/23/2010	8:53:13 PM	PH3 valve closed
6/23/2010	8:53:13 PM	SiCl4 pre valve closed
6/23/2010	8:53:13 PM	SiCl4 post valve closed
6/23/2010	8:53:13 PM	Main Vac valve closed
6/23/2010	8:53:13 PM	Bypass valve closed
6/23/2010	8:53:13 PM	Bubbler valve closed
6/23/2010	8:53:13 PM	Helium valve opened
6/23/2010	8:53:13 PM	Helium MFC set to  500.000000
6/23/2010	8:53:13 PM	H2 MFC set to  0.000000
6/23/2010	8:53:13 PM	BCl3 MFC set to  0.000000
6/23/2010	8:53:13 PM	PHl3 MFC set to  0.000000
6/23/2010	8:53:13 PM	SiCl4 MFC set to  0.000000
6/23/2010	8:53:13 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	8:53:13 PM	Tube furnace set to 0
6/23/2010	8:54:34 PM	Helium valve closed
6/23/2010	8:54:34 PM	H2 valve closed
6/23/2010	8:54:34 PM	BCl3 valve closed
6/23/2010	8:54:34 PM	PH3 valve closed
6/23/2010	8:54:34 PM	SiCl4 pre valve closed
6/23/2010	8:54:34 PM	SiCl4 post valve closed
6/23/2010	8:54:34 PM	Main Vac valve closed
6/23/2010	8:54:34 PM	Bypass valve closed
6/23/2010	8:54:34 PM	Bubbler valve closed
6/23/2010	8:54:34 PM	Helium MFC set to  0.000000
6/23/2010	8:54:34 PM	H2 MFC set to  0.000000
6/23/2010	8:54:34 PM	BCl3 MFC set to  0.000000
6/23/2010	8:54:34 PM	PHl3 MFC set to  0.000000
6/23/2010	8:54:34 PM	SiCl4 MFC set to  0.000000
6/23/2010	8:54:34 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	8:54:34 PM	Tube furnace set to 0
6/23/2010	8:54:49 PM	Helium valve closed
6/23/2010	8:54:49 PM	H2 valve closed
6/23/2010	8:54:49 PM	BCl3 valve closed
6/23/2010	8:54:49 PM	PH3 valve closed
6/23/2010	8:54:49 PM	SiCl4 pre valve closed
6/23/2010	8:54:49 PM	SiCl4 post valve closed
6/23/2010	8:54:49 PM	Main Vac valve closed
6/23/2010	8:54:49 PM	Bubbler valve closed
6/23/2010	8:54:49 PM	Bypass valve opened
6/23/2010	8:54:49 PM	Helium MFC set to  0.000000
6/23/2010	8:54:49 PM	H2 MFC set to  0.000000
6/23/2010	8:54:49 PM	BCl3 MFC set to  0.000000
6/23/2010	8:54:49 PM	PHl3 MFC set to  0.000000
6/23/2010	8:54:49 PM	SiCl4 MFC set to  0.000000
6/23/2010	8:54:49 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	8:54:49 PM	Tube furnace set to 0
6/23/2010	8:55:22 PM	Helium valve closed
6/23/2010	8:55:22 PM	H2 valve closed
6/23/2010	8:55:22 PM	BCl3 valve closed
6/23/2010	8:55:22 PM	PH3 valve closed
6/23/2010	8:55:22 PM	SiCl4 pre valve closed
6/23/2010	8:55:22 PM	SiCl4 post valve closed
6/23/2010	8:55:22 PM	Bubbler valve closed
6/23/2010	8:55:22 PM	Main Vac valve opened
6/23/2010	8:55:22 PM	Bypass valve opened
6/23/2010	8:55:22 PM	Helium MFC set to  0.000000
6/23/2010	8:55:22 PM	H2 MFC set to  0.000000
6/23/2010	8:55:22 PM	BCl3 MFC set to  0.000000
6/23/2010	8:55:22 PM	PHl3 MFC set to  0.000000
6/23/2010	8:55:22 PM	SiCl4 MFC set to  0.000000
6/23/2010	8:55:22 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	8:55:22 PM	Tube furnace set to 0
6/23/2010	9:00:22 PM	H2 valve closed
6/23/2010	9:00:22 PM	BCl3 valve closed
6/23/2010	9:00:22 PM	PH3 valve closed
6/23/2010	9:00:22 PM	SiCl4 pre valve closed
6/23/2010	9:00:22 PM	SiCl4 post valve closed
6/23/2010	9:00:22 PM	Main Vac valve closed
6/23/2010	9:00:22 PM	Bypass valve closed
6/23/2010	9:00:22 PM	Bubbler valve closed
6/23/2010	9:00:22 PM	Helium valve opened
6/23/2010	9:00:22 PM	Helium MFC set to  500.000000
6/23/2010	9:00:22 PM	H2 MFC set to  0.000000
6/23/2010	9:00:22 PM	BCl3 MFC set to  0.000000
6/23/2010	9:00:22 PM	PHl3 MFC set to  0.000000
6/23/2010	9:00:22 PM	SiCl4 MFC set to  0.000000
6/23/2010	9:00:22 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	9:00:22 PM	Tube furnace set to 0
6/23/2010	9:01:42 PM	Helium valve closed
6/23/2010	9:01:42 PM	H2 valve closed
6/23/2010	9:01:42 PM	BCl3 valve closed
6/23/2010	9:01:42 PM	PH3 valve closed
6/23/2010	9:01:42 PM	SiCl4 pre valve closed
6/23/2010	9:01:42 PM	SiCl4 post valve closed
6/23/2010	9:01:42 PM	Main Vac valve closed
6/23/2010	9:01:42 PM	Bypass valve closed
6/23/2010	9:01:42 PM	Bubbler valve closed
6/23/2010	9:01:42 PM	Helium MFC set to  0.000000
6/23/2010	9:01:42 PM	H2 MFC set to  0.000000
6/23/2010	9:01:42 PM	BCl3 MFC set to  0.000000
6/23/2010	9:01:42 PM	PHl3 MFC set to  0.000000
6/23/2010	9:01:42 PM	SiCl4 MFC set to  0.000000
6/23/2010	9:01:42 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	9:01:43 PM	Tube furnace set to 0
6/23/2010	9:01:58 PM	Helium valve closed
6/23/2010	9:01:58 PM	H2 valve closed
6/23/2010	9:01:58 PM	BCl3 valve closed
6/23/2010	9:01:58 PM	PH3 valve closed
6/23/2010	9:01:58 PM	SiCl4 pre valve closed
6/23/2010	9:01:58 PM	SiCl4 post valve closed
6/23/2010	9:01:58 PM	Main Vac valve closed
6/23/2010	9:01:58 PM	Bubbler valve closed
6/23/2010	9:01:58 PM	Bypass valve opened
6/23/2010	9:01:58 PM	Helium MFC set to  0.000000
6/23/2010	9:01:58 PM	H2 MFC set to  0.000000
6/23/2010	9:01:58 PM	BCl3 MFC set to  0.000000
6/23/2010	9:01:58 PM	PHl3 MFC set to  0.000000
6/23/2010	9:01:58 PM	SiCl4 MFC set to  0.000000
6/23/2010	9:01:58 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	9:01:58 PM	Tube furnace set to 0
6/23/2010	9:02:31 PM	Helium valve closed
6/23/2010	9:02:31 PM	H2 valve closed
6/23/2010	9:02:31 PM	BCl3 valve closed
6/23/2010	9:02:31 PM	PH3 valve closed
6/23/2010	9:02:31 PM	SiCl4 pre valve closed
6/23/2010	9:02:31 PM	SiCl4 post valve closed
6/23/2010	9:02:31 PM	Bubbler valve closed
6/23/2010	9:02:31 PM	Main Vac valve opened
6/23/2010	9:02:31 PM	Bypass valve opened
6/23/2010	9:02:31 PM	Helium MFC set to  0.000000
6/23/2010	9:02:31 PM	H2 MFC set to  0.000000
6/23/2010	9:02:31 PM	BCl3 MFC set to  0.000000
6/23/2010	9:02:31 PM	PHl3 MFC set to  0.000000
6/23/2010	9:02:31 PM	SiCl4 MFC set to  0.000000
6/23/2010	9:02:31 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	9:02:31 PM	Tube furnace set to 0
6/23/2010	9:07:31 PM	Helium valve closed
6/23/2010	9:07:31 PM	H2 valve closed
6/23/2010	9:07:31 PM	BCl3 valve closed
6/23/2010	9:07:31 PM	PH3 valve closed
6/23/2010	9:07:31 PM	SiCl4 pre valve closed
6/23/2010	9:07:31 PM	SiCl4 post valve closed
6/23/2010	9:07:31 PM	Bubbler valve closed
6/23/2010	9:07:31 PM	Main Vac valve opened
6/23/2010	9:07:31 PM	Bypass valve opened
6/23/2010	9:07:31 PM	Helium MFC set to  0.000000
6/23/2010	9:07:31 PM	H2 MFC set to  0.000000
6/23/2010	9:07:31 PM	BCl3 MFC set to  0.000000
6/23/2010	9:07:31 PM	PHl3 MFC set to  0.000000
6/23/2010	9:07:31 PM	SiCl4 MFC set to  0.000000
6/23/2010	9:07:31 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	9:07:31 PM	Tube furnace set to 0
6/23/2010	9:07:32 PM	Run finished at 9:07 PM
6/23/2010	9:07:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
6/23/2010	9:29:07 PM	Helium MFC set to  100.000000
6/23/2010	9:29:10 PM	Helium valve opened
6/23/2010	9:35:09 PM	Helium valve closed
6/23/2010	9:35:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/23/2010	9:35:11 PM	Recipe started at 9:35 PM
6/23/2010	9:35:11 PM	Helium valve closed
6/23/2010	9:35:11 PM	H2 valve closed
6/23/2010	9:35:11 PM	BCl3 valve closed
6/23/2010	9:35:11 PM	PH3 valve closed
6/23/2010	9:35:11 PM	SiCl4 pre valve closed
6/23/2010	9:35:11 PM	SiCl4 post valve closed
6/23/2010	9:35:11 PM	Main Vac valve closed
6/23/2010	9:35:11 PM	Bubbler valve closed
6/23/2010	9:35:11 PM	Bypass valve opened
6/23/2010	9:35:11 PM	Helium MFC set to  0.000000
6/23/2010	9:35:11 PM	H2 MFC set to  0.000000
6/23/2010	9:35:11 PM	BCl3 MFC set to  0.000000
6/23/2010	9:35:11 PM	PHl3 MFC set to  0.000000
6/23/2010	9:35:11 PM	SiCl4 MFC set to  0.000000
6/23/2010	9:35:11 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	9:35:11 PM	Tube furnace set to 0
6/23/2010	9:35:12 PM	Helium valve closed
6/23/2010	9:35:12 PM	H2 valve closed
6/23/2010	9:35:12 PM	BCl3 valve closed
6/23/2010	9:35:12 PM	PH3 valve closed
6/23/2010	9:35:12 PM	SiCl4 pre valve closed
6/23/2010	9:35:12 PM	SiCl4 post valve closed
6/23/2010	9:35:12 PM	Bubbler valve closed
6/23/2010	9:35:12 PM	Main Vac valve opened
6/23/2010	9:35:12 PM	Bypass valve opened
6/23/2010	9:35:12 PM	Helium MFC set to  0.000000
6/23/2010	9:35:12 PM	H2 MFC set to  0.000000
6/23/2010	9:35:12 PM	BCl3 MFC set to  0.000000
6/23/2010	9:35:12 PM	PHl3 MFC set to  0.000000
6/23/2010	9:35:12 PM	SiCl4 MFC set to  0.000000
6/23/2010	9:35:12 PM	Bypass solenoid MFC set to  0.000000
6/23/2010	9:35:12 PM	Tube furnace set to 0
6/23/2010	9:35:12 PM	Run finished at 9:35 PM
6/23/2010	9:35:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
